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SPIE 2024

SPIE 2024

February 25-29, 2024
San Jose, California, USA

Join us for multiple experts lecture:

From lab to fab – In-line SIMS for process control in Nanosheet Gate-All-Around device manufacturing– February 26th  2024 • 4:30 PM – 4:50 PM PST

On-Cell Thickness Monitoring of Chalcogenide Alloy Layer using Spectral Interferometry, Raman spectroscopy, and Hybrid Machine Learning– February 27th 2024 • 11:20 AM – 11:40 AM PST

Spectral interferometry for TSV metrology in chiplet technology– February 29th 2024 • 2:10 PM – 2:30 PM PST

OCD metrology for Wafer-to-Wafer hybrid bonding– February 29th 2024 • 2:50 PM – 3:10 PM PST

Unique Spectral Interferometry solutions for complex High Aspect Ratio 3D NAND structures– 29 February 2024 • 4:00 PM – 4:20 PM PST