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Events and Presentations

VLSI 2020

  • 14-06-2020 - 19-06-2020
  • Online Event

Tom Larson, VP New Business Innovation will host and moderate a VLSI first ever workshop about Metrology: Know Where You are Going: Metrology in the New Age of Semiconductor Manufacturing.

Speakers and Presentations included in the workshop:

  • Keiji Suzuki, KIOXA Corporation – “Manufacturing Process Challenges and Requirements for Metrology in Semiconductor Memory Devices
  • Yi Hung Lin, TSMC – “Metrology with Angstrom Accuracy Required by Logic IC Manufacturing – Challenges From R&D to High Volume Manufacturing and Solutions in the AI Era”
  • Philippe Leray, imec – “Dimensional Metrology overview, trends and upcoming challenges”
  • Mark Shirey, KLA – “Defect Inspection: A Trio of Trends for the 2020s”
  • Kavita Shah, Nova Measuring Instruments – “Enabling Modern Semiconductor Manufacturing With Materials Metrology”
  • Markus Kuhn, Manager, Intel – “Opportunities and Challenges for Lab-based Characterization for Emerging Technologies”

VLSI 2020 is now an online symposium, so you can join and attend from anywhere in the world.