With a background in material science and a passion for innovation, Dr. Xinrui Lyu's inspiring path unfolds from her days of scientific fascination to becoming a pivotal member of Nova's DMD department. Through challenges, accomplishments, and a profound commitment to her role, her story reflects the thriving spirit of women in engineering and technology, showcasing the profound impact of diversity and ingenuity within the field.
Could you please tell us a bit about yourself, your current position, the duration of your time at Nova, and your academic background?
I have been a part of the Nova team for three years now, serving as a Senior Application Engineer within the DMD department. My journey with Nova began immediately after completing my Ph.D. in material science.
At what age did you realize you were interested in STEM?
When I was in middle school, I discovered the captivating world of science. This fascination ignited my journey towards becoming a bachelor’s in science and engineering. Eventually, I pursued a Ph.D. in the same field, marking significant steps in my academic and professional path.
What supported you in your challenging journey to your PhD?
I feel fortunate to have received a recommendation to pursue my PhD without the burden of exams. Recognizing this as a remarkable opportunity, I eagerly embraced the challenge.
In addition, during the course of my doctoral studies, cupid’s arrow got me as I met my future husband within the same research group. Our mutual support became an anchor in our academic pursuits, leading both of us to successfully attain our PhD diplomas.
Can you tell us a bit about your journey as an application engineer at Nova?
I had knowledge of optical measurement and simulation during my Ph.D. studies, but I had very limited exposure to semiconductors before joining Nova. I didn’t know what the models for each measurement step looked like, so I began learning by downloading the models and libraries that my colleagues had developed. Furthermore, I gained insight into semiconductor fabrication processes through online articles and customer interactions, which greatly contributed to my enhanced comprehension of the models.
What attracted you to work at Nova?
I am a self-disciplined individual, and I wanted to be in a flexible work environment. At Nova, I have the autonomy I desire. I particularly appreciate the flexibility to work from home and have a relatively adaptable schedule.
How would you describe the culture and work environment at Nova?
Nova is a diverse melting pot of talents from around the world. We get to collaborate, chat with our HQ team, and every now and then, we even have those in-person face-to-face meetups during training or workshops. This year, I was fortunate enough to undergo training at HQ, and you know what? The entire HQ team appears to genuinely take pleasure in what they do – it's infectious!
As an application engineer, what are some of the key responsibilities and challenges you face in your role?
As an application engineer, I also get involved in sales on occasion. I get to talk about the latest tools and techniques to our customers. This way I also get to see the business side of my activity which creates a richer work experience.
How does Nova support your professional growth and development?
Whenever I hit a challenge with applications, we're in sync with HQ to troubleshoot. Plus, Nova offers various webinars and platforms like Stream & Metro where I can tap into some handy insights.
Can you share a personal success story or achievement that you're proud of during your time at Nova?
One accomplishment I'm particularly proud of is my instrumental support for the First MMSR demo at a leading customer, which led to my promotion from an application engineer to a Senior Application Engineer. Over the course of six months, my dedication and effort were recognized not only by my line manager but also by the sales team at our agent NET.
Beyond work, do you have any intriguing hobbies or passions that you enjoy pursuing?
I'm someone who approaches life with boundless energy. While I have a variety of hobbies, they tend to evolve over time and may not always endure for long periods. But one hobby I really like to pursue is sewing.
Have there been any specific role models or mentors who have left an impact on your career journey?
My introduction to Nova happened through a referral program. My colleague, Clark Yang, who had been a part of the Nova team for nearly 3 years introduced me to the company. Interestingly, he was my line manager then, and as circumstances have it, he's moved on to another department while I've assumed his former role.
What advice would you give to other women aspiring to enter the field of engineering or technology?
It's vital to recognize that engineering and technology are by no means exclusive domains for men. Women have a pivotal role to play, leveraging our innate attentiveness to detail. Our distinct perspectives often lead to the cultivation of exceptional ideas, borne out of the diverse thought processes that men and women bring to the table. So, let's dismiss any notion of being underqualified and embrace our capabilities with confidence.
With a background in material science and a passion for innovation, Dr. Xinrui Lyu's inspiring path unfolds from her days of scientific fascination to becoming a pivotal member of Nova's DMD department. Through challenges, accomplishments, and a profound commitment to her role, her story reflects the thriving spirit of women in engineering and technology, showcasing the profound impact of diversity and ingenuity within the field.
Could you please tell us a bit about yourself, your current position, the duration of your time at Nova, and your academic background?
I have been a part of the Nova team for three years now, serving as a Senior Application Engineer within the DMD department. My journey with Nova began immediately after completing my Ph.D. in material science.
At what age did you realize you were interested in STEM?
When I was in middle school, I discovered the captivating world of science. This fascination ignited my journey towards becoming a bachelor’s in science and engineering. Eventually, I pursued a Ph.D. in the same field, marking significant steps in my academic and professional path.
What supported you in your challenging journey to your PhD?
I feel fortunate to have received a recommendation to pursue my PhD without the burden of exams. Recognizing this as a remarkable opportunity, I eagerly embraced the challenge.
In addition, during the course of my doctoral studies, cupid’s arrow got me as I met my future husband within the same research group. Our mutual support became an anchor in our academic pursuits, leading both of us to successfully attain our PhD diplomas.
Can you tell us a bit about your journey as an application engineer at Nova?
I had knowledge of optical measurement and simulation during my Ph.D. studies, but I had very limited exposure to semiconductors before joining Nova. I didn’t know what the models for each measurement step looked like, so I began learning by downloading the models and libraries that my colleagues had developed. Furthermore, I gained insight into semiconductor fabrication processes through online articles and customer interactions, which greatly contributed to my enhanced comprehension of the models.
What attracted you to work at Nova?
I am a self-disciplined individual, and I wanted to be in a flexible work environment. At Nova, I have the autonomy I desire. I particularly appreciate the flexibility to work from home and have a relatively adaptable schedule.
How would you describe the culture and work environment at Nova?
Nova is a diverse melting pot of talents from around the world. We get to collaborate, chat with our HQ team, and every now and then, we even have those in-person face-to-face meetups during training or workshops. This year, I was fortunate enough to undergo training at HQ, and you know what? The entire HQ team appears to genuinely take pleasure in what they do – it's infectious!
As an application engineer, what are some of the key responsibilities and challenges you face in your role?
As an application engineer, I also get involved in sales on occasion. I get to talk about the latest tools and techniques to our customers. This way I also get to see the business side of my activity which creates a richer work experience.
How does Nova support your professional growth and development?
Whenever I hit a challenge with applications, we're in sync with HQ to troubleshoot. Plus, Nova offers various webinars and platforms like Stream & Metro where I can tap into some handy insights.
Can you share a personal success story or achievement that you're proud of during your time at Nova?
One accomplishment I'm particularly proud of is my instrumental support for the First MMSR demo at a leading customer, which led to my promotion from an application engineer to a Senior Application Engineer. Over the course of six months, my dedication and effort were recognized not only by my line manager but also by the sales team at our agent NET.
Beyond work, do you have any intriguing hobbies or passions that you enjoy pursuing?
I'm someone who approaches life with boundless energy. While I have a variety of hobbies, they tend to evolve over time and may not always endure for long periods. But one hobby I really like to pursue is sewing.
Have there been any specific role models or mentors who have left an impact on your career journey?
My introduction to Nova happened through a referral program. My colleague, Clark Yang, who had been a part of the Nova team for nearly 3 years introduced me to the company. Interestingly, he was my line manager then, and as circumstances have it, he's moved on to another department while I've assumed his former role.
What advice would you give to other women aspiring to enter the field of engineering or technology?
It's vital to recognize that engineering and technology are by no means exclusive domains for men. Women have a pivotal role to play, leveraging our innate attentiveness to detail. Our distinct perspectives often lead to the cultivation of exceptional ideas, borne out of the diverse thought processes that men and women bring to the table. So, let's dismiss any notion of being underqualified and embrace our capabilities with confidence.
Amos Lu's 20-year journey at Nova Taiwan started with a nervous interview in which he never thought a journey would begin turning him into a seasoned technical manager. Amos witnessed Nova's familial culture grow and expand, he saw its growth in the semiconductor industry, and even now, 20 years later, he still envisions a bright future for Nova Taiwan's excellence and innovation.
Amos, you've been with Nova Taiwan for an impressive 20 years since the office opened. Can you share with us how your journey at Nova began and what made you choose to stay with the company for such a long time?
Sure. I still remember the day I went to Nova's office for an interview. I was nervous at first since it was my first time interviewing in English with a foreigner. But the interview went well, and I was offered the job.
I've stayed with Nova for so long because I love the company culture. It's like a family here. Everyone is friendly and helpful, and we all work together to achieve common goals. I've also learned a lot during my time at Nova, and I've had the opportunity to travel the world and meet people from different cultures. This is the place where everyone knows each other by name and even the CEO, when he comes to visit knows people's names.
As we celebrate Nova's 30th anniversary, what are some of the most significant changes you've witnessed in your career at Nova over the past two decades?
Nova has grown a lot in the past 20 years. When I first started, we were a small company and here in Taiwan, we were just a few employees. But we've grown steadily, and now we have offices all over the world. We've also developed new technologies that are helping to advance the semiconductor industry.
How has your role as a technical manager evolved during your time at Nova? Are there any specific challenges or milestones that stand out to you?
My role as a technical manager has evolved a lot over the years. When I first started, I was responsible for legacy tools. But as Nova has grown, I've taken on more responsibility. I'm now responsible for a team of field service engineers, who are providing service for both legacy as well as newer and more advanced products.
One of the biggest challenges I've faced is the constant need to learn new things. Nova’s products are constantly evolving to exceed customers' needs, so I need to stay up-to-date on the latest technologies. I've also had to learn how to manage a team of people from different cultures and backgrounds.
But I've also had a lot of milestones in my career. I'm proud to have helped Nova grow into the company it is today. I'm also proud of the work I've done to support our customers and help them achieve their goals.
How has Nova supported your personal and professional development over the years?
Nova has supported my personal and professional development in many ways. I've had the opportunity to attend training courses, both in-house and at external institutions. I've also been given the opportunity to take on new challenges and responsibilities.
Nova is also a great place to learn from other people. I've learned a lot from my colleagues, both technical and non-technical.
Can you share a memorable experience or project that you've worked on during your tenure at Nova Taiwan?
One of my most memorable experiences was when I was working on a challenging project. The tool wasn’t stable and despite best efforts, it looked as though the only solution was to ship the tool back and replace it with a new one. This is the most expensive solution for the company, and I decided to do my best to find a solution.
I was determined to study the root cause myself, so I disassemble the components to check and placed the parts on a table.
After a thorough examination found the cause and sent the information to headquarters. Once they received my feedback, they figured out that they can fix the error in that single component and send a new one to replace it, thus saving the need to replace the entire tool. I was very happy and proud that I didn’t give up and had a significant contribution to solving this issue.
As a technical manager, what advice would you give to someone just starting their career at Nova or in the field of semiconductor technology?
My advice to someone just starting their career at Nova is to be passionate about learning. Learn the fundamentals of the tools, the technology, the installation process, and everything that is going on behind the scenes.
Can you share an example of a time when you experienced the true spirit of teamwork at Nova?
Sure. There are many cases like this. For example, one of our FSEs in Tainan urgently needed a part, and the local factory ran out of stock for this part. To solve this as efficiently as possible, our service coordinator found out that that part is available in the warehouse in Hsinchu. The service coordinator sent a request to the logistics department. The logistics assistant personally delivered the part to a bus station, and once the bus arrived at Tainan, the site leader personally collected it and gave it to the FSE in the field. This, to me a perfect example of teamwork and willingness to do what it takes to provide excellent service, despite various challenges.
Throughout your career, what has been your biggest achievement or moment of pride at Nova?
Working with highly demanding customers is my team’s day-to-day challenge. I’m very proud that we received an award of excellence from TSMC, for a project we were all very dedicated to, which allowed us to launch our product on a very tight schedule.
Even our CEO came for a visit and to be part of the award ceremony.
Are there any funny or memorable anecdotes from your time at Nova that you can share with us?
We held a big team meeting with all employees from Asia-Pacific in Thailand including our CEO. The dinner was on a beach, the atmosphere was great and after a few rounds of drinks, we started to throw each other to the sea; managers and CEO included. We felt like a family.
As Nova Taiwan celebrates its 20th anniversary, what do you envision for the future of the office and its contribution to the semiconductor industry?
In the semiconductor arena, Taiwan is a significant player. With numerous major semiconductor manufacturers operating for more than two decades, these facilities have a strong presence. Our Nova Taiwan office strategically collaborates with clients, engaging in close interactions with diverse partners daily. Valuable insights are gained from our customers, providing a deep understanding of their unique needs, process intricacies, and how Nova can effectively contribute to process monitoring.
As technology nodes continue to decrease in size each passing year, the complexity of process challenges intensifies. This prompts customers to measure a higher volume of wafers to gain a comprehensive grasp of process conditions. While this presents growth opportunities for Nova, it also brings forth significant challenges. Can our technology adequately meet the demands of our customers? This question acts as a driving force, urging Nova to consistently enhance our tools and capabilities, enabling us to effectively assist customers in overcoming intricate process issues.
From the start, I've always envisioned a promising future for Nova Taiwan, and I remain steadfast in that belief.
Lastly, what makes Nova Taiwan special to you, and what excites you the most about being part of the Nova family?
Nova Taiwan is special to me because it's like a family. Everyone is friendly and supportive, and we all work together to achieve common goals. I'm excited to be part of the Nova family because I know that I'm surrounded by talented and passionate people. I'm also excited to see what the future holds for Nova Taiwan. I believe that we have the potential to do great things.
Meet Marina, a devoted mother of two, who has been an integral part of our QA department for over 5 years. Marina is a true embodiment of humor and optimism, radiating unparalleled creativity and curiosity, and possessing a remarkable capacity for continuous learning. When faced with the diagnosis of Parkinson's, she refused to let it hinder her spirit. As the function on the right side of her body decreased, Marina adapted, becoming left-handed. And if that doesn't already amaze you, just wait until you hear about Marina's awe-inspiring hobbies and her determination to overcome daily struggles.
Could you please share a bit about yourself?
I'm 37 years old, and a proud mother to Matan, who's 12, and Yoni, who's 9. For the past 5 years, I've been an essential member of Nova's team, initially as a software QA specialist and recently, I was promoted to the role of Technical Leader. My focus mainly revolves around testing software on the server side and working with Big Data. I'm quite a technical enthusiast, always eager to explore and scrutinize things, which naturally leads me to immerse myself in learning about our products, not just for professional purposes but also to expand my general knowledge. This passion for learning has allowed me to become well-versed in various aspects of Nova's products, and I'm always ready to lend a helping hand when it comes to testing from a tool's perspective. Additionally, I happily provide guidance and training to our new team members, fostering a collaborative and supportive work environment.
What fuels your high motivation for learning and conducting research, even after five years here at Nova?
It seems that the activation of both brain lobes plays a significant role – it's not just a coincidence!
What do you mean by this? Could you elaborate, please?
I was born right-handed, but due to the damage caused by Parkinson's disease, my right side was affected. Despite the challenges, I knew I had to adapt and continue living a normal life. So, I taught myself to become left-handed, and now I am almost completely left-handed.
About eight years ago, I went through a very tough period when I had to take care of my ill parents who eventually passed away six months apart. During that time, I was in school, pregnant, and facing numerous challenges. It was an incredibly stressful period. After some time, I started feeling unbalanced while standing, thinking it was an orthopedic issue. Little did I know that these were early signs of Parkinson's, which typically begins long before any noticeable external symptoms appear. The actual diagnosis came at the age of 31, just before starting a new job at Nova, during a very demanding time in my life.
From the time I noticed the weakness and until I received the official diagnosis, about a year and a half had passed. I found out about the diagnosis on my own, by accessing the personal area on the hospital's website, while I was alone at home. Being a somewhat cynical person with a dark sense of humor, I decided to celebrate it as my "diagnosis anniversary" and commemorate six years since the diagnosis this September.
We would like to congratulate you on your strength and resilience
Thank you! Oh, absolutely, go ahead and say it! If I can still laugh in the face of this situation, then I'm already winning against the disease! Every passing year, as I laugh at the disease and celebrate the anniversary, I see it as another victory. This is my attitude.
I chose to keep on living. On one hand, I was diagnosed with a disease more commonly associated with older individuals when I was just 31, and there's no cure for it. But on the other hand, I have two young children at home, and I know I must continue living for them. I'm only at the beginning of my journey. When I first learned about the disease, I could have given in to feelings of helplessness and despair, thinking, "Oh, fate, what am I going to do now?" and crying in the darkness. But that's just not who I am. I am determined to keep moving forward with strength and optimism.
This is incredible!
You were hired around the same time you were diagnosed, right? How did they react to it at Nova?
Initially, it was irrelevant because the disease wasn't visible, and it didn't affect my work or cause any issues. There was no need to discuss it. At the age of 31, as a young woman, I felt embarrassed about it. I remember thinking, "Am I really going to tell them that I 'vibrate' in my free time?"
As the Parkinson's became more noticeable, I decided to face it head-on. I realized that it is what it is, and we'll deal with it as it comes. If someone asks, I'm honest about it. Honestly, I find people's reactions quite amusing at times. Sometimes, I even playfully emphasize it on purpose and enjoy their surprised expressions. It's become a way to break the ice and show that I can handle life with a sense of humor and positivity.
How do people really react?
It usually begins with a curious look, followed by questions like "What happened?" "Do you need any help?" or "Why are you limping?" The responses are generally very kind and sympathetic. As someone who is cynical, I often reply, "Oh, I have Parkinson's. It seems that many people lack awareness about young individuals being affected by this disease or have limited knowledge and familiarity with Parkinson's in general. The common perception is of an older person or someone severely debilitated, which doesn't match my situation at all.
Did Nova make specific adjustments to help and facilitate your work? Do you even need such adjustments?
Yes, as time went on, I noticed that sitting for extended periods was becoming more challenging. Sometimes I have to stand for about three minutes, and other times it may take up to ten minutes until I feel settled again - and that's just wasted time. So, I asked and was provided with a standing desk, an electric one that resolves this issue. Personally, it is very beneficial for me, and I'm grateful that they accommodated this request, even though nobody here had encountered such a need before.
Can you share and tell us about your hobbies too?
Sure, just let me give you some background first: The Parkinson's damage primarily affects the right side of my body, so the tremor is on the right side, and there is weakness and stiffness both in my leg and hand. As time goes on, or during moments of fatigue or stress, my right hand becomes less functional; it shakes, and typing or using the mouse becomes more difficult. Essentially, every daily action becomes more challenging when my hand is unstable. The solution for me was to start using my other hand. Today, not only is it functional, but I can even make jewelry with it, and I really enjoy doing it!
It's reached the point where my subconscious has become so accustomed to using my left hand that even in the jewelry I prepare, I thread the clasp of the chains to the left. Until someone pointed it out to me, I didn't even notice it; it's likely deeply ingrained in my subconscious now.

Where did the idea to make jewelry come from?
It all started with a burst of creativity that had been hidden and dormant for many years. I was searching for something to do, and one day I stumbled upon epoxy jewelry on Pinterest. It looked simple enough. Intrigued, I decided to give it a try. To my surprise, people loved my creations, including friends and acquaintances. Encouraged by a good friend, I opened a shop on Etsy and began promoting my work on Facebook, creating flyers, videos, and graphics for self-advertisement, all of which I enjoyed doing.
While my Etsy shop didn't flourish as expected due to limited awareness of the platform in Israel, I started a page on Instagram and relied on word of mouth to spread the word. As I spent more time on the internet, I discovered various gadgets that allowed me to expand beyond just jewelry making. Now, my creative endeavors have evolved to include branding cups, bottles, shirts, textiles of all kinds, signs, and pretty much anything you can imagine – I'm up for the challenge!
Could you also tell us about your Instagram page, Mr.WittyBoard?
Sure! My Instagram page, Mr.WittyBoard, showcases an array of creative message boards.
If you're not familiar with message boards, they are quirky signs displaying humorous and thought-provoking messages. I have one sitting on my desk in the office, and each week I change the sentence to keep things fresh and entertaining. It's amazing how these simple boards can resonate with people! I've built an audience of fans, including fellow Nova colleagues who enjoy the wit and charm of these boards. It's been a delightful experience to connect with others through humor and creativity on my Instagram page.
And you have another page that got a facelift recently, right?
Originally, it was a jewelry page, but since it now showcases a wide range of my creations, I decided to rename it to "Shaking Art." On this page, you can find all the items I make, and each piece can be customized and purchased. As you scroll down, you might notice that the earlier photos are less impressive, but as you go up, the shots become much more captivating. Through this process, I've also honed my photography and editing skills.
Aside from my hobbies and creative ventures, I dedicate a significant amount of time to researching Parkinson's. One notable example is a Facebook group called "Living with Parkinson's," where I actively advise and share my experiences and knowledge. My choice is to continue living with Parkinson's and confront the daily challenges that come with the disease, demonstrating that it is entirely possible to overcome them with resilience and determination!
Igor Turovets has been a dedicated employee at Nova for over 23 years, while also actively volunteering for an NGO that provides emotional and spiritual support to individuals facing challenging life circumstances.
What has been your experience working at Nova for over 23 years?
I've had the opportunity to work on various projects in different roles, beginning as an application specialist and progressing to become an Application Manager and a Senior Scientist on the CTO team. Each role has facilitated the development of new skills and provided me with fresh perspectives on the industry. It has been a continuous journey of learning and personal growth that I have truly
What has been the most fulfilling aspect of your daily life at Nova?
The continuous opportunities for learning and personal growth at Nova have been exceptionally fulfilling. I consistently discover new avenues to contribute to the company's development, whether it involves researching innovative ideas or taking on diverse roles. This ongoing process of exploration keeps me engaged and motivated. Being a part of Nova's development and growth throughout the years has been genuinely rewarding, and I eagerly look forward to what the future holds for the company.
You have a unique volunteering experience; could you share what inspired you to volunteer with an association that provides spiritual support for individuals facing challenging life circumstances?
Offering emotional and spiritual support to individuals navigating difficult life circumstances is a cause that resonates deeply with me. It is a privilege to be able to guide and uplift those who are going through challenging times, and to have the opportunity to make a positive impact in their lives. When the opportunity to work with the association "Shutafim Lamasa" (which translates to "Companions for The Journey" in Hebrew) presented itself, I recognized its potential for a meaningful and fulfilling volunteer experience.
What is the significance of the spiritual guidance you offer and how does it contribute to enhancing the quality of life for those you support?
The spiritual guidance provided by our association volunteers is rooted in the principles of Buddhism, which perceive life as a series of transitions, encompassing even the transition from life to death. This perspective serves to uplift and improve the quality of life for those we assist, including individuals who may not hold beliefs in an afterlife. It helps them to grasp the inherent value of life and discover meaning in the midst of challenging circumstances. This process necessitates patience, understanding, and compassion, and witnessing the positive impact it has on the individuals I support is truly rewarding.
What kind of activities do you engage in with the individuals you guide, and how do you support them in coping with their struggles?
The foremost priority is to be present for the person, providing a compassionate ear and a genuine understanding of their experiences. We engage in open and meaningful conversations about topics that are important to them. Additionally, if needed, we incorporate meditation and mindfulness exercises, utilizing simple and direct methods to enhance the quality of life for those we assist.
Emotional support and guidance are also fundamental aspects of our approach. We strive to help individuals comprehend the nature of their struggles and explore effective coping strategies. This approach demands empathy, understanding, and patience. Witnessing the positive impact it has on the individuals we guide is truly fulfilling and inspiring.
Could you please provide an example of how your guidance has made a meaningful impact on someone's life?
Certainly! I would like to share a fortunate case where the spiritual guidance I offered resulted in a positive outcome. One of the individuals I supported was a cancer patient who, thanks to modern medicine, managed to achieve a complete recovery from the disease. However, she faced the challenge of recovering from the lingering side effects of the illness and reintegrating into a vibrant and functional daily life. It was truly inspiring to witness how my guidance and support assisted her throughout this arduous journey, helping her successfully navigate the difficulties and regain her vitality.
Considering your understanding of the transition between life and death, do you have any advice for embracing a life lived to the fullest?
The true essence of life exists in the present moment, in the here and now. Yesterday is but a memory and tomorrow remains uncertain. One piece of advice I have is to openly express the positive feelings we hold for our loved ones. While we may harbor these emotions deep within our hearts, it is not always evident to them unless we actively convey them. The time to do so is today, without delay.
A poignant example shared by a member of our association comes from a woman whose son passed away at the tender age of 11. She revealed that the last year of his life was so abundant and meaningful that it might have encompassed a more profound life experience than many who live to be 80 years old. This is the ideal we should strive for each day – to infuse our lives with richness and purpose.
By contemplating the inevitability of death in this manner, the present moment takes on an entirely different significance. It serves as a reminder to cherish the time we share with our loved ones and to make the most of every precious moment we have together.
From being the first service personnel to install one of the very first tools to creating Nova's extensive Operations teams. Nova's COO, Gabi Sharon, shares his 27 years journey at Nova.
Can you please share your journey at Nova from the moment you joined the company to your current role as COO?
I joined Nova in September 1995, which is now 27 to 28 years ago. It has been an incredible journey. When I first joined, Nova was a start-up company that was still figuring out the right product to offer. Today, the company has grown significantly and now employs 1,200 people, with over 4,000 active systems installed in the field. I am proud to have seen the company's evolution and growth in technology, people, culture, vision, finances, investor relations, and customer and partner relationships. It is exciting to witness the significant progress and development the company has undergone, especially in recent years.
Rumor has it that you were personally involved in the installation of the first Nova Tool. Can you share some details about that experience?
I was the first person to join Nova and take care of the service field. The company was in the final stages of developing its first product, and I was recruited to build the entire service organization. Just three weeks after joining Nova, I went to support the installation of the first or second system, even though I had limited knowledge of it, and I approached it with awe.
There were two dramatic moments during the installation process. Firstly, the system was very unstable, and I had to spend a week working with the development team over the phone, days and nights, to improve parameters and calibrate the system to get it working. Imagine that the system detected the measurement site with great difficulty, I assume that only 70% of the measurement sites were identified. Today the result is very good, approaching almost 100%.
The second one occurred on the night before I was scheduled to fly back home, the system suddenly stopped working. After hours of troubleshooting, I finally discovered that it was just a blown electric fuse. The next morning, I stood outside the RadioShack store in the early morning, hoping and praying that they would have the specific fuse I needed to fix the system and once I found it, I rushed back to the customer to install it.
I still remember the sense of relief I felt when the system finally worked after the unstable prototype system caused so much stress. I also recall waiting outside the store, praying that they had the specific fuse I needed to fix the system.
What a great story - What else do you remember about that experience?
A few weeks after the installation I traveled to the same customer with the Measurement Unit (MU) in my hand. For those who are familiar with our system, the MU is the central part of it and it contains all the optics and the XY stage, making it incredibly sensitive. I knew that sending it as a suitcase in the belly of the plane could potentially lead to damage or loss, so I took it with me on the plane. The flight attendant was confused as to why I was bringing a box on board, but I insisted that I wouldn't let it out of my sight. Thanks to my determination, I was eventually allowed to fly with the MU. When I arrived at the customer's location, I installed it and the system worked perfectly.
How has the industry evolved since you joined Nova?
The semiconductor industry and Nova have experienced continuous change with "never a dull moment". The technology has progressed significantly over the years, from 20 and 25 years ago to the present day. We have all felt the impact of digitization in our personal lives. Today, we use more chips than we did five or ten years ago, and these chips are smarter, faster, and consume less energy. For those who love technology and the power it holds, it is an exciting journey to be a part of. Even for those familiar with the manufacturing process (Fab), it is fascinating to witness the technological advancements in silicon placement and chemistry that results in chips capable of performing numerous calculations in mere tenths of a second.
We talked about the industry and technology, now let's delve into Nova's culture. tell me a little about Nova's culture, and how it developed from the time you joined until now?
There are two aspects to the concept of culture: on the one hand, Nova has maintained its sense of community and closeness among its employees - I'm talking about the camaraderie, the bond between colleagues, the openness to voice everything you think and this is something that has not changed significantly over the years - and that's a positive thing. I think that all of us, when we arrive at the workplace, feel very comfortable and at ease with the people around us - these are people who I think share similar cultural values and beliefs with us. And this is what I think strongly aligns the people with the company's goals. Additionally, throughout its history, the company has demonstrated a strong commitment to innovation. It has consistently recognized the importance of fostering a culture of creativity and has allocated appropriate resources to support this goal. As a result, the company has established itself as a leader in its industry and has set the standard for cutting-edge solutions and services. This unwavering focus on innovation has been a key factor in the company's continued success and growth.
On the other hand, I think that a change that is very welcome has happened, it is the more business-oriented perspective that the company has developed. Compared to 20 years ago, Nova was more technology-oriented, and product-focused, with less emphasis on customer needs and business aspects. And today I think that this balance between business and technology is in a very, very good place. We see the growth of the company, especially in recent years, as being very significant due to this combination.
What advice do you have for someone just starting his or her career?
My advice for someone starting their career would be to constantly look for ways to bring extra value and differentiate themselves in each role they take on. Focus on developing, advancing, and enhancing your skills and extend your areas of responsibility. Seek opportunities to grow and make your position more interesting and impactful for both you and the company.
Can you share a project that you consider a particularly noteworthy accomplishment in your career, whether from recent times or from earlier in your time at the company?
In the recent period, one of the major accomplishments of the operation was delivering all the systems requested by our customers, even in the face of the COVID-19 crisis and even though many of us were working remotely and faced incredible challenges with the supply chain. This proved me that our efforts in building professional processes and interfaces across our operational departments have proven to be successful. Our partnership and supplier management methodology, developed over the years, has effectively ensured smooth operations and a high level of efficiency within our organization. I believe this is a remarkable achievement for all the operational departments within the company.
One early important achievement, which I’m proud of, is establishing the customer service lineup. This was a long-term team effort that involved hiring personnel to serve all our customers, setting up offices in various regions we operate in, and developing a strategic vision for our customer service. Our goal is to always be close to our customers and hire individuals who see the value in providing excellent service and enjoy doing so. I remember that from day one, customers consistently gave positive feedback about our service personnel, thanks to our culture of always being ready to support. Each service engineer has the full support of the company behind them, which enables us to effectively solve any problems that arise. I believe this close relationship with our customers is extremely powerful.
What can you share about the process of setting up the clean rooms, which was one of the biggest challenges of the last period?
The establishment of the new clean rooms in Israel and the USA was a complex task as we had to consider the future development of our products and plan accordingly for the manufacturing facilities. During the room planning process, stringent protocols for cleanliness, temperature stabilization, humidity control, floor vibration mitigation, and acoustic noise reduction were carefully considered. The room layout and logistics areas were meticulously planned with the goal of maximizing efficiency, optimizing utilization of space, and most important providing a safe and ergonomic work environment for our employees. During the planning phase, we had to determine the material and production flow requirements and set high standards to make the room functional and suitable for employees to work in, while incorporating a significant level of automation. A lot of thought and planning went into the construction of the clean room before actual construction began. Now, seeing the clean room near completion, I am proud to see that it meets high standards of the semiconductor industry. While there were challenges in the construction process, these challenges only add to the excitement of the project and make it more fulfilling. At Nova, challenges like these energize us and it's great to see them finally being overcome.
Meet Liora Abramov, the 31-year-old accountant who's all about spreading the word on Nova. From her beginning as a revenue controller, Liora has grown to become a "Financial Storyteller" at Nova, leading a team of women. With her sights set on creating a horizontal platform for unifying perspectives, Liora's second role at Nova is nothing short of exciting and fulfilling.
“Before we begin, allow me to say that when I first walked through the doors at Nova, I knew I had found something special. And let me tell you, my colleagues here are some of the brightest and most talented people I've ever had the pleasure of working with.”
What an opening! That's what's called... an impressive entrance.
So tell me a little about yourself, Liora.
“My name is Liora Abramov and I'm a 31-year-old accountant. I'm married with two young daughters, and they are counting down the days until they can participate in the next great event Nova puts on for kids. I've been with Nova for three years now, but it feels like a lifetime. I've grown so much both personally and professionally since starting here.
Before Nova, I studied Economics and Accounting at Tel Aviv University, and worked as audit manager at PWC. But at Nova, I've taken on my first role outside of an accounting firm. My goal was always to work for a global company that does good in the world, and that's exactly what I found here. As financiers, our mission is to tell the company's story through our financial reports, and I'm proud to be a part of that.
I started at Nova as a Revenue Controller and EU Controller, but as the company grew, I took on the role of Corporate Controller.”
Tell us more about how did your career evolve at Nova?
With Nova’s growth we realized that better communication and integration between the various global finance teams, is required.
Thanks to Nova’s open-minded approach, I was able to make significant progress , establish new work interfaces with other departments, and this led to an offer to assume a role that hadn't existed before.
Knowing that Nova offers its employees growth opportunities, I jumped at the chance to take on this new role with a cross-organizational and global perspective.
What is your personal experience in your second role at Nova?
The flexibility to take on more responsibilities and expand my knowledge is truly exciting and it's a pleasure to be able to shape my own position. It's a true testament to Nova's commitment to fostering personal and professional growth for their employees.
What allows you to maintain such high motivation and enthusiasm for your work for nearly 3 years?
The people at Nova are what keeps me motivated and enthusiastic about my work. The company's focus on personal and professional development, along with Nova’s management ability to build high motivation in the team, creates a truly dynamic and energizing work environment.
The emphasis on innovation and building for the future at Nova is inspiring and it's exciting to be a part of that. I get to learn new things every day, some of them directly impact my day-to-day work and some are focused on improving personal skills and tools to preform better in my role.
Even my daughters feel like they are part of Nova. They are not just fans of the company - they're practically ambassadors for it. They love the fun events and gifts that Nova provides for families and feel like active participants in the company's culture. When my eldest daughter was asked what she wanted to be when she grew up, she said "I want to work at Nova".
I couldn't be prouder.
The company's summer camp for children is also a huge plus, which allowed me to work with peace of mind knowing my kids are nearby, having a blast with fun activities and making great memories.
Stunning!
At Nova, a leading semiconductor metrology provider, innovation is a top value both as a strategy and as a daily practice. In an exclusive interview, the company's CTO, Dr. Shay Wolfling, shares how this concept provides a unique competitive advantage in the rapidly changing chip market.
When Dr. Shay Wolfling, a physics expert, joined Nova as its CTO about 11 years ago, very little about the company was the same as it is today. Over the past decade, Nova has experienced tremendous growth, acquiring two companies, significantly increasing its revenue and employee count, and shifting its technology direction and product lines. Yet, one constant remains at the core of its DNA: its commitment to innovation as a daily working method.
Nova is a leading provider of metrology solutions for the semiconductor industry. Founded in 1993 in Israel, the company currently employs over 1,100 people across eight countries worldwide and is listed on Nasdaq and the TA-35 index on the Tel Aviv Stock Exchange. Nova serves leading semiconductor manufacturers such as Intel, Samsung, and TSMC with its advanced high-tech systems for quality control processes throughout the entire chip production chain. With over 4,700 systems installed globally, the company’s strategy centers around building a diverse and comprehensive portfolio of metrology solutions to drive the growth of the semiconductor manufacturing industry.
Breakthrough solutions for manufacturing process control
The chip industry drives the technological revolution in the digital age and has been required to progress at an unprecedented pace during the COVID-19 pandemic. Like many other sectors, the long-term success of the semiconductor manufacturing industry depends on its ability to turn innovative ideas into commercially viable products. The technology development process – from proving feasibility to commercial production – is a complex challenge that demands extensive expertise and investment in various areas, a prolonged development timeline, and exceptional innovation capabilities.
Tight control over the production process is essential for success, and this is where Nova plays a crucial role. In the semiconductor industry, they deal with sophisticated computer chips composed of billions of tiny devices measured in nanometers (billionths of a meter). During the production process, numerous materials with properties that are highly sensitive to contamination and process variations are used. Reliable control systems are necessary to allow semiconductor manufacturers to monitor the manufacturing process, detect potential issues, and standardize operations in advance.
As Dr. Wolfling explains, “We take new and cutting-edge metrology technologies, refine them, and bring them to the world’s most advanced production lines to provide the semiconductor industry with groundbreaking solutions for process control. Our products integrate optical, mechanical, and advanced electronics components with innovative software and algorithms, giving top chip manufacturers an accurate and dependable view of what’s happening during the development and production of the most advanced chips.”
There is always a way through the wall
Nova started its journey in Dimensional Metrology and has since grown and diversified through acquisitions. Today, the company operates three divisions: the Dimensional Metrology Division, the company’s original division established in Israel; the Materials Metrology Division, established in 2015 with the acquisition of ReVera and serving as Nova’s R&D and production center in California; and the Chemical Metrology Division, founded in 2022 through the acquisition of ancosys GmbH and serving as Nova’s R&D and production center in Germany.
Dr. Wolfling is a graduate of the IDF’s Talpiot project and a former entrepreneur who founded Nano Light Technologies, a start-up that developed a unique technology that was eventually sold to a Belgian company. After the Belgian company was acquired by KLA, Dr. Wolfling continued to work there until joining Nova. He leads the CTO group with over 20 researchers, half of whom hold Ph.D. degrees, as well as 30+ technology experts across the company’s divisions, creating a significant concentration of scientific talent within Nova.
What is the CTO group you lead responsible for?
“The CTO group is responsible for developing and implementing long-term technology strategies. This involves starting new product lines and expanding existing ones, both organically and through acquisitions. We have a close relationship with customers to ensure our innovation meets their needs and provides practical, business and technology solutions for the industry both now and in the future. The group is given freedom for innovation and research, but it is not just academic work. We always consider the needs of the industry and upcoming problems, and it gives us great satisfaction when our innovation successfully meets customer needs.
In addition, the CTO group is also accountable for Nova’s global intellectual property matters, taking part in government initiatives and programs, and overseeing partnerships with research institutes, academic institutions, and industry partners.”
Dr. Wolfling explains that the “long-term technological advancement occurs globally, with advanced technology units in each division. These are multidisciplinary teams made up of physicists, algorithm specialists, electrical engineers, and process engineers who conduct research and feasibility tests within their respective areas of expertise. These teams report to the division managers in terms of organization, but are professionally accountable to the CTO, allowing for multiple innovation cycles and creating synergies across the company and a comprehensive overview of future products and technologies.”
“We adhere to the principle that even as a market leader, it’s not sufficient to simply enhance products, but new capabilities must be brought to maintain that leadership. It’s fulfilling to see employees who started developing new technologies 7 or 8 years ago still contributing to the development of new capabilities as those products reach customers. These achievements reinforce our confidence that even the seemingly insurmountable tasks can be overcome. There’s always a path through the obstacle.”
Resting on one’s laurels is boring
Taking an innovative vision at Nova is a daily experience for the company’s employees. Dr. Anna Hirsch, who has been working at Nova for three years as an Algorithms Specialist, shares her perspective on what it’s like. She holds a bachelor’s degree in materials engineering, as well as a master’s degree and a doctorate in computational chemistry from the Weizmann Institute. After completing her doctorate, she joined Nova.
“The essence of innovation is doing something that you’re not sure how to do. There’s no set protocol or prior knowledge; you have to come up with the solution on your own. It’s not a straightforward process,” explains Dr. Hirsch. “To enjoy it, you have to be willing to embrace the unknown, not shy away from it. We work as a team, consult each other, and everyone contributes their unique expertise. Our solutions are interdisciplinary and encompass aspects of physics, chemistry, materials engineering, electrical engineering, algorithmics, and more.”
“We embrace the challenge of starting from scratch and pushing the boundaries of what is known. This is what drives us and makes coming to work every day exciting. As a multidisciplinary team, we draw on a range of expertise in physics, chemistry, materials engineering, electrical engineering, and algorithmics to find innovative solutions. Our work environment encourages thinking outside the box and taking risks, with a supportive team to back us up. When we achieve a breakthrough, it’s incredibly satisfying, but we never rest on our laurels. There’s always another question or challenge waiting for us, keeping us motivated and engaged.”
How does this work?
We hold team meetings every week to discuss and address any challenges that arise. The collective dialogue is crucial because it provides an opportunity to bring up problems, even if no one else currently has a solution. Our goal is to foster continuous innovation and keep the creative process flowing. By encouraging interaction and collaboration, we create an environment that allows for diverse thought processes and new ideas to emerge. This is why we place great importance on open communication and mutual stimulation within our team.
From the laboratory to the production line
The integration of advanced and diverse materials into the chip manufacturing process posed a challenge that required the development of new systems and technologies. Nova took on this challenge by transitioning laboratory technologies into commercial systems through the process known as “lab-to-fab.” A noteworthy example of this is Nova ELIPSON™ , a cutting-edge metrology system for characterizing materials using Raman spectroscopy – a technology that earned its inventor a Nobel Prize.
The development of the Elipson technology at Nova involved a journey from the lab to the fab. A research project, led by the company’s CTO group and involving collaboration with academia and leading customers, resulted in a prototype that showed the capability to characterize materials using Raman spectroscopy. The team was then expanded to include hardware, software, and theoretical model development units. The technology was then improved and adapted to a commercial product suited for 24/7 operation on production lines. The positive feedback from customers demonstrated the commercial potential of the technology, and it was eventually launched as a Nova product called Nova ELIPSON. Now, the technology is manufactured and sold commercially.
“Turning a basic technology into a commercially available product is a rare feat in our industry,” says Dr. Wolfling. “This process is a testament to our innovation. We not only added new capabilities, but also established a completely new technology product line for Nova.”
“At Nova, we provide ample opportunities for our researchers to be creative and innovative. However, we are not just an academic institution. Our focus is on meeting the needs of the industry and anticipating future challenges. When we are able to align our innovations with their needs, it brings great satisfaction and success.”
The article first appeared in “The Israeli Hi-Tech Book”, a marketing content magazine published by “The Marker Labels”
Before studying in the US, Dr. Yi Yang had never been abroad. But she trusted her instincts, the encouragement of her family, and a chance to pursue her dreams to find success in her Ph.D. program. Today she's putting her skills in mass spectrometry to work at Nova and inspiring other young women to pursue careers in the sciences.
Yi, Tell us a little bit about yourself.
I was born and raised in Beijing and attended graduate school in the US at Stony Brook University in Long Island, New York. At Stony Brook, I earned my Ph.D. in physical chemistry. My research was focused on mass spectrometry, instrumentation, and atmospheric new particle formation. I really enjoyed mass spectrometry and instrumentation in general. That’s why when I was looking for a job, I specifically searched for those keywords, and that’s how I found Nova on LinkedIn. I then joined Nova in March 2021.
What was the subject area of your first and second degrees?
I studied chemistry in college and completed my master’s at the same university in Beijing. After that, I went to the US to complete my Ph.D.
What made you decide to move to a new country to study?
My parents encouraged me to consider studying abroad, as they didn’t have this opportunity themselves.
I was a little bit hesitant to go abroad after finishing my master’s, but they really encouraged me to. And to be honest, I miss them a lot.
Tell us a little about your experience moving to a new country and studying in a different language and culture.
Moving to the USA was a big change in my life. This was not only my first time in the USA but actually my first time abroad.
I learned a lot during this journey. I had the privilege to work on my Ph.D. in a very friendly environment. The lab team, the group I joined, and my advisor were all very welcoming. In our small research group, I was the only foreign student. All of my group members were US natives, including our host, my advisor, and my fellow students. We are still in touch to this day.
My advisor, particularly, is a good friend and someone I respect greatly. He was very helpful and shared all his knowledge to support me during my PhD studies. He encouraged me to write papers and take on professional speaking engagements. This helped me build my confidence, and eventually, I became the first Ph.D. to graduate from our group.
This positive experience is what led to me joining Nova.
What made you go into the field of chemistry?
I think I am an observant person. I tend to notice those little changes in my environment and all the details. In addition, I like doing experiments. I liked chemistry already in high school. But to be honest, before college, I was debating between chemistry and literature.
So I chose English as my double major in college. And then, I went on to earn my M.S. in chemistry.
Now that you’ve been at Nova for a year and a half, what is it that makes you choose Nova every day?
I studied mass spectrometry in graduate school and really liked it. I would like to work on mass spectrometers in my career. I choose Nova because I learn new things every day and contribute with my experience and knowledge.
Where do you see yourself in the future?
As you know, the semiconductor industry requires a lot of knowledge, skill, and experience, and I am young and still do not have much experience. In the future, my goal is one day to become an expert in the mass spectrometry instrument field.
You just recently moved to another position. What are you going to do now?
Previously I was a tech support engineer, mainly providing support wherever I was needed. In my new position, I work as a systems engineer. In this position, I define how some functions should be performed and assure the quality of each function along the way.
What kind of welcome did you receive at Nova when you joined?
The second most important reason I enjoy working every day is my colleagues. The team I’m working with are people I respect very much due to their kindness and hard work. They are incredibly friendly. These people have several decades of experience in this field and are willing to share their knowledge and support me in my everyday work.
If you had to choose one thing that characterizes you most- what would it be?
Persistence.
I always feel like I just need to keep going. Especially since completing my Ph.D., I have a deeper understanding of this because sometimes you must face and resolve the problem yourself. And you simply have to be persistent enough to solve it.
Ion implantation is a key process in the semiconductor industry but can be impacted by various factors. The article suggests using in-line Secondary Ion Mass Spectroscopy (SIMS) to improve implant process control and meet demand for consistent implantation materials by measuring peak concentration, peak depth, and dose simultaneously.
Abstract
In the semiconductor industry, ion implantation process has expanded to a wide range of applications with doses and energies spanning several orders of magnitude.
Ion implantation is a very complicated process with many parameters and factors that affect the implant profile.
For example, shadowing effects from higher aspect ratio of photoresist opening, ion channeling or de-channeling effects due to implant angle variations, and dose and implant energy accuracies are all important factors in achieving uniform device performance and good product
yield. In addition, current process controls are done on test wafers with certain time intervals, where broken sample pieces are sent outside of the fab for SIMS analysis.
The turnaround time is generally long, and the results often do not reflect the actual production conditions. It is known in some cases that, while the control charts are in good standing, the product has failed to meet its specification.
The demand for consistent implantation material is becoming more and more important. Hence, the desire for better implant process control is sorely needed.
This article explores how utilizing Secondary Ion Mass Spectroscopy, (SIMS) in-line to measure peak concentration, peak depth, and dose simultaneously to provide better implant process control.
Background and Introduction
The implantation of ions, mainly Boron, Phosphorous, and Arsenic, have a long history of use in semiconductor manufacturing. By implanting ionized atoms into a semiconductor material n-wells or p-wells can be created, changing the conductivity of the material, a technique that is often used to control threshold voltages of MOSFET devices. The creation of p-n junctions via ion implantation can prevent current flow to the substrate. Alternatively, ion implantation can create contacts to lower contact resistance and prevent diode formation. In the semiconductor industry, ion implantation process has expanded to a wide range of applications, as shown in Figure 1, with doses and energies spanning several orders of magnitude. Depending on the device, a large number of implant operations may be required in the manufacturing process flow.
Figure 1. Ion implantation applications in silicon technology at various doses and implant energies1
After implantation, the concentration distribution of the implanted ions within the material will resemble a Pearson IV distribution, with the peak depth being controlled by the implantation energy and the concentration being controlled by the implantation dose. Due to the Pearson IV distribution of the implanted ions, the only metrology method capable of measuring the peak concentration, peak depth, and dose simultaneously is Secondary Ion Mass Spectroscopy, or SIMS. By sputtering down through a material, a depth profile of the implanted atoms can be measured, giving a complete look of the shape, amplitude, and depth of the implanted ion distribution.
Figure 2 shows the distribution of implanted Boron in Silicon using a TRIM/SRIM Monte Carlo simulation.
Figure 2. Using TRIM/SRIM, (a) Monte Carlo simulation of ion implantation, and (b) Distribution of implanted Boron atoms in Silicon.
Ion Implant Metrology Challenges
Ion implantation is a very complicated process with many parameters and factors that affect the implant profile. For example, shadowing effects from higher aspect ratio of photoresist opening, ion channeling or de-channeling effects
due to implant angle variations, and dose and implant energy accuracies are all important factors in achieving uniform device performance and good product yield. In addition,current process controls are done on test wafers with certain
time intervals, where broken sample pieces are sent outside of the fab for SIMS analysis. The turnaround time is generally long, and the results often do not reflect the actual production conditions. It is known in some cases that, while the control charts are in good standing, the product has failed to meet its specification. The demand for consistent implantation material is becoming more and more important. Hence, the desire for better implant process control is sorely needed.
METRION®
Nova’s METRION® is a 300mm wafer-level in-line SIMS metrology system developed to seamlessly integrate with an automated high-volume manufacturing (HVM) fab environment.
It is a fully automated recipe driven metrology tool utilizing a Magnetic Sector mass analyzer to provide high quality dynamic SIMS depth profiles. It has an O2 ion source that ranges from low to medium high in beam energy for a variety of applications. Because METRION® utilizes a low voltage secondary ion extraction field, it enables stable and repeatable measurements within a 50um x 50um metrology pad on product wafers. With multiple parallel detectors, METRION® can measure multiple species simultaneously through the entire film stack, providing high data density capable of achieving higher depth resolution.
Process automation with built-in film analysis and recipe management make the system easy to use and shorten the time to data.
B-implant Application
Boron is one of the most commonly implanted species in semiconductors. It has one fewer valence electron than Silicon, which upon implant, results in a p-type semiconductor. As shown in Fig 1, Boron implant is used in a wide range of applications, in all types of devices in both logic and memory space.
Figure 3. METRION® vs Lab SIMS results for 1e+15 Dose B Implant in Si wafers with Implant Energies of 5, 10, 20, and 30keV.
Figure 3 compares various B-implant SIMS profiles between METRION® and lab equipment. As can be seen, the Boron concentration vs depth profiles from METRION® matches very well with results from lab SIMS. With a full wafer measurement capability, wafer maps can easily be generated from measurements of multiple locations on the wafers, enabling within wafer uniformity process control charts.
Figure 4 shows a wafer map example of the Boron peak concentration variation across the wafer, for the 10keV implanted B sample.
Figure 4. Wafer map of B peak concentration, 10keV Implant
As a HVM metrology tool, precision of the measurement is an important metric. In Figure 5, five profiles, which were measured at locations adjacent to each other as proxy for repeatability testing, are overlayed. As can be seen, all the profiles match very well with each other, demonstrating the stability of METRION® SIMS measurements. For most implant dopants, a relative standard deviation (RSD) of <2% can typically be achieved.
Figure 5. Overlayed of 5x repeat B-implant profiles
Summary
Nova’s METRION® system is an innovative SIMS platform designed for the Fab environment, seamlessly integrating into an automated factory workflow. The system is engineered to deliver wafer-based high precision metrology results for process control in logic and memory devices, as demonstrated on ion implant applications. This is enabling Statistical Process Control (SPC) of the ion implant process parameters and providing in-line data correlating to electrical performance.
Authors: Benjamin Hickey, Wei Ti Li, Sarah Okada, Lawrence Rooney, Feng Zhang
First published at SIMS 23
Tell me a little about yourself.
I’m married to Peli who is a SW developer at applied materials, which means we both work in the Semi industry ????. Together we have 3 amazing girls: Yuli, Emily, and Yuval, and a Cat, Joy. I live in Beit Hashmonay and studied Management and Logistics.
What do you do at Nova and how long have you been working here?
I’ve been working for Nova for 9 years as a senior strategic buyer responsible for Electro-Optics Commodity, EFEM (FI) & Computing.
I started out as a Strategic Buyer for Computing and Electronics and over the years, my career evolved, and I became a senior buyer, and my account was focused on strategic TK. Later on, I took the role of leading the RMA cycle across the Procurement team. I really enjoy exploring the processes and optimizing them as best as possible.
From your professional experience, what makes you choose Nova every day?
I have two main reasons:
First and foremost: the people working at Nova.
I go to work every day feeling that the colleagues I work with are also my personal friends and I would almost say they are like a family.
And the second thing that makes me feel great working here is the professional challenges I am dealing with. In my position in the procurement department, Nova allows me to take responsibility for a vast array of commodities, to work with various position holders from CTO/R&D to the Production level. I’m constantly motivated to learn about new technologies, explore additional technical needs, and research so that I provide the best solutions for my counterparts at Nova.
This allows me to develop optimal procurement agreements for the organization and make the best when I manage the day-to-day activities and relationships with the suppliers to assure positive partnerships in the long run.
We all know that the procurement department has an exceptionally unique friendly atmosphere- care to share a little about this?
That is such an accurate description! The procurement team is my happy place! They are not just my colleagues or team members, they are my friends! I feel confident consulting with them and sharing my personal experiences. I know that I will always be accepted for who I am no matter what. We do have a unique team with a friendly and supportive atmosphere.
I wouldn’t exaggerate by stating that at Nova I made my closest friends. The women that I talk to on a daily basis, share professional as well as personal experiences and life events, we spend our weekends together and even traveled abroad for vacation. Even our husbands became good friends, and they have their own WhatsApp group, which is mostly used to complain about us ????
That sounds awesome.
You often travel for business- what does a typical business trip look like for you?
A typical business trip feels as though someone put my life on fast forward. There are so many things happening!
Many long-distance flights, long working days full of meetings, production reviews, and technical discussions alongside quality reviews. There is also some time for fun with dinner meetings or strolling around the cities I visit.
And then, in the morning back to the meetings. Sometimes it repeats on the following day or on my next business trip to a different location on the Globe.
One thing that always happens during these trips is that I miss my family very much. I am fortunate to have an amazingly supportive husband that helps me pursue my professional passion.
What do you enjoy doing in your spare time?
I am a huge fan of sports and in my spare time, I enjoy playing Catch ball. Basically, if I’m not at home or at work I’m on the court.
Along with my friend and colleague from the procurement department, Efrat Arad, we initiated a women’s catch ball team here at Nova. This has been a long-time dream of mine, and now, with the support of Nova’s well-being team, this is actually happening and we already have a dozen great players getting together once a week for practice. This is really a dream come true.
This is really inspiring to see how you made your dream come true.
Where do you see yourself in 5 years?
I hope to be happy and evolve my career in a way that challenges me to succeed and excel.
Let’s finalize with a question many want to ask, but never dared: What is your superpower?
I jump really really high ????
Well, that sounds very useful for someone who plays catch ball and is as ambitious and energetic as you are