Nova Astera® Prime

A new unparalleled measurement accuracy dimension in Optical CD

Nova Astera™ Prime

Nova Astera® Prime offers stand-alone level performance in a compact form factor that is perfectly suited for integrated metrology. Utilizing oblique and normal incidence channel measurements, Nova Astera® Prime provides an unmatched level of accuracy, precision, tool-to-tool matching, and extendibility.

Highlights and Benefits

R&D Support

Best Metrology Performance

Complex Structures

Advanced Modeling

R&D Support

Best Metrology Performance

Complex Structures

Advanced Modeling

R&D Support

Supports the most advanced R&D challenges for CMP, etch and deposition segments

Best Metrology Performance

Achieves the highest accuracy, precision and tool-to-tool matching by adding measurement channels

Complex Structures

Deals with the most complicated 3D structures by measuring a large number of parameters with the highest productivity

Advanced Modeling

Offers the latest advanced modeling and machine-learning algorithms incorporated with unique hardware to provide fastest application time to solution

Nova Astera™ Prime

Why Nova Astera® Prime?

Semiconductor manufacturers face multiple process complexities, growing development time challenges, and many yield improvement obstacles. This has increased the demand for tighter specs and smaller process windows, as well as for metrology solutions that reduce overall measurement uncertainty. Due to such fabrication complexity, there is a need to measure in-die with minimal within-wafer/within-die variation, which requires the highest levels of accuracy.

Enabling robust measurement for challenging OCD applications in DRAM, 3DNAND, and logic, Nova Astera® Prime brings unmatched capabilities to integrated metrology. The solution utilizes advanced physical and machine learning algorithms to offer the fastest available application time to solution. Gathering rich spectral information content through multiple channels, Nova Astera® Prime provides the necessary sensitivity to solve complex 3D optical CD applications that require monitoring a growing number of parameters.

Nova Astera® Prime is designed to support the development of the most advanced device technologies beyond the most advanced logic nanosheet architectures and multi-layer, multi-deck 3D-NAND nodes.

When supported by Nova’s central fleet management, control and connectivity suite, Nova Astera® Prime offers even greater operational efficiency and advanced metrology control functionality.

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Press Releases

Nova Introduces Unique Portfolio to Address Next-Generation Logic Fabrication Challenges

Nova Introduces Unique Portfolio to Address Next-Generation Logic Fabrication Challenges

17 Feb, 2022
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IBM Research and Nova Jointly Awarded the “Best Metrology Paper” at SPIE Advanced Lithography Conference

IBM Research and Nova Jointly Awarded the “Best Metrology Paper” at SPIE Advanced Lithography Conference

26 Apr, 2022
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