Nova’s Data Empowered Metrology Solution

NovaFit modeling suite compliments traditional modeling of Optical Critical Dimensions by machine learning and data driven algorithmic solutions. The algorithmic suite works in conjunction with NovaMARS® augmented modeling engine and Nova’s Fleet management solution to improve metrology performance, speed up time to solution and expend metrology envelope for enriched process control. NovaFit embeds the most advanced machine learning and big data architecture into optical modelling, revolutionizes the way customers utilize metrology measurement data and expands the metrology performance envelope to tighten process windows, avoid process excursions and improve yield. The platform was designed to interface with other process control tools for accuracy improvement and shorter recipe development and control cycles.

Highlights and Benefits

  • Superior accuracy to reference metrology
  • Excellent productivity enabler of highly complex applications
  • Extended process control and excursion prevention
  • Robustness of the solution to process changes by injection of external information