Metrology Technology

Masters of Disruptive Thinking and Innovative Technologies

Nova’s state-of-the-art metrology solutions are based on multiple advanced technologies in various fields of expertise, including Optical Scatterometry, x-ray photoelectron spectroscopy (XPS), x-ray fluorescence (XRF), scatterometry modeling software and high-performance computing.

Our Technologies

  • Dimensional Metrology Icon

    Dimensional Metrology

    Integrated and Stand-alone optical platforms for CD and thin films measurements
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  • Materials Metrology Icon

    Materials Metrology

    Inline XPS and XRF platforms for composition and film thickness measurements
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  • Software Modeling Icon

    Software Modeling

    Advanced modeling solutions empowered by physical and machine learning algorithms
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Fostering Partnership to Enable Tomorrow’s Technologies

Nova partners with leading customer R&D centers, academies and research institutes to co-develop innovative process control solutions for next generations’ logic and memory technologies such as FinFET, Nanowires, 3D-NAND and emerging memory technologies.