Nova MARS®
Advanced 3D Modeling Software for Optical Critical Dimension Calculation
The Nova MARS® software package is a multi-channel metrology physical modeling engine designed for the most complex 3D structures in advanced process node fabrication.
A complete modeling solution for scatterometry model development, material characterization and recipe optimization, Nova MARS® utilizes physical and process-related knowledge to gain insight into complex structures.
The solution is enhanced with measured and analyzed data from Nova Fit® and Nova Fleet Management ®, utilizing NOVA’s high-performance computational platform (HPC) for time-to-solution optimization.