Products Overview
Nova MARS®

Nova MARS®

Advanced 3D Modeling Software for Optical Critical Dimension Calculation

The Nova MARS® software package is a multi-channel metrology physical modeling engine designed for the most complex 3D structures in advanced process node fabrication.

A complete modeling solution for scatterometry model development, material characterization and recipe optimization, Nova MARS® utilizes physical and process-related knowledge to gain insight into complex structures.

The solution is enhanced with measured and analyzed data from Nova Fit® and Nova Fleet Management ®, utilizing NOVA’s high-performance computational platform (HPC) for time-to-solution optimization.

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