Technology Overview
Dimensional Metrology
Dimensional Metrology

Dimensional Metrology

Decisive Insights for Every Decision
Decisive Insights for Every Decision

Nova’s advanced multidisciplinary dimensional metrology technologies combine complex opto-mechanical hardware with advanced optics, , AI-enabled software and cutting-edge algorithms to continuously innovate for effective process control throughout the semiconductor fabrication life cycle. Nova’s technical innovation and market leadership enable customers to improve process performance, enhance product yield, and accelerate time to market.

Technologies
Hybrid Metrology
Hybrid Metrology
Spectral Interferometry
Spectral Interferometry
Optical Scatterometry
Optical Scatterometry
Advanced Imaging
Advanced Imaging

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