Dimensional Metrology

Pioneers in Industrializing Emerging Metrology Solutions
Nova’s advanced multi-disciplinary dimensional metrology technologies combine complex opto-mechanical hard-ware with advanced optics and leading-edge algorithms, which deliver continuous innovation for effective process control throughout the semiconductor fabrication lifecycle. Nova’s technical innovation and market leadership enable customers to improve process performance, enhance products’ yields and accelerate time to market.
Technologies
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Spectral InterferometryExplore Technology >
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Optical ScatterometryExplore Technology >
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Advanced ImagingExplore Technology >
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Hybrid MetrologyExplore Technology >
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Big Data AnalyticsExplore Technology >