Nova PRISM

A new dimension in Optical CD

Nova PRISM

Nova PRISM is a highly advanced field-proven platform designed to meet the tightest metrology and high-productivity requirements. Nova PRISM utilizes a combination of comprehensive spectral information with advanced modeling and machine-learning capabilities, to address complex challenges in optical critical dimensions. The platform’s unique combination of information channels improves the robustness of incoming process variability.  The exclusive SI technology reveals unique information about the measured sample and enhances sensitivity and robustness to the monitored structural dimensions and material properties.

 

Highlights and Benefits

Comprehensive Spectral Information

Application Performance

Powerful Hardware

Software Synergy

Future-Ready

Comprehensive Spectral Information

Application Performance

Powerful Hardware

Software Synergy

Future-Ready

Comprehensive Spectral Information

Nova PRISM combines state-of-the-art multi-channel Spectral Ellipsometry and Spectral Reflectometry with revolutionary Spectral Interferometry (SI) in a novel integration to extend metrology capabilities beyond traditional optical critical dimensions

Application Performance

Robustness within a tight process window, ability to address the most complex optical CD application challenges and flexible configuration

Powerful Hardware

New platform design, latest innovations in optical design and throughput benefits for high productivity

Software Synergy

Implementation of Nova MARS™ physical modeling solutions and Nova FIT™ machine learning capabilities further accelerates performance and productivity at unmatched levels

Future-Ready

The modular design and unique SI optical path support future innovation and improvements. Its unique architecture allows for easy deployment of the latest technology advancements, enabling extendibility

Nova PRISM

Why Nova PRISM?

A solution that can provide additional information and unique insight to all major semiconductor segments, including advanced logic (nanosheet), DRAM and 3D NAND.

Its high throughput matches the demands of high-volume manufacturing, allowing a high sampling and improving yield by providing critical data.

The SI technology allows new techniques for application development that enable addressing critical process challenges and metrology needs, while  multiple, spectral information channels allow customization to the specific needs of each application, to deliver optimized metrology with the highest productivity.

Nova PRISM incorporates the latest advancements in machine learning algorithms working in synergy with the unique spectral information produced by the platform.

What is Nova PRISM?

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Press Releases

Nova PRISM Selected by Additional Leading Global Manufacturer

Nova PRISM Selected by Additional Leading Global Manufacturer

13 Sep, 2021
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Nova Introduces Unique Portfolio to Address Next-Generation Logic Fabrication Challenges

Nova Introduces Unique Portfolio to Address Next-Generation Logic Fabrication Challenges

17 Feb, 2022
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