Products Overview Materials Metrology
Nova VeraFlex® III+

Nova VeraFlex® III+

Inline XPS and XRF system to enhance thin-film metrology and process control

Nova VeraFlex® III

Nova VeraFlex® III+ LE-XRF system is a fourth-generation inline X-ray photoelectron spectroscopy (XPS) tool featuring hardware innovations to enhance thin-film metrology and process control. The system offers additional capabilities for simultaneous low energy X-ray fluorescence (LE-XRF) spectroscopy that expands the application space.

Highlights and Benefits

Measurement Locations

Direct Measurement

Improved Precision

New Application Enabler

Measurement Locations

Direct Measurement

Improved Precision

New Application Enabler

Measurement Locations

Measurements on 2D pads or in-die add value by offering customers measurement location options. In-die measurements typically maintain the highest correlation to electrical performance

Direct Measurement

Directly measures the photoelectrons from a single ultra-thin layer or multiple layer stack. This is superior to optical methods, which convolve thickness and optical properties, by using a direct uncorrelated measurement of thickness and composition resulting in the only viable solution for ultra-thin film and complex stacks

Improved Precision

Provides improved results for films comprised of dopants or non-proportional elemental compositions

New Application Enabler

Enables new applications for emerging thinner films and film structures in advanced Memory and Logic with simultaneous XPS and XRF capabilities. The combination of XPS and LE-XRF addresses dose and thickness measurements of complex films simultaneously

Nova VeraFlex® IV

Why Nova VeraFlex® III+ XF?

Nova VeraFlex® III+ XF features a proprietary high-current electron gun that increases X-ray flux and delivers significantly higher precision and throughput. The system is designed for varied processing requirements with beam size tunability for on-pad or in-die measurement options. Together, these innovations result in improved sensitivity, precision and productivity for a wide range of applications.

You Might be Interested in

Demonstrating a DNA of InNOVAtion

There are Infinite ways to innovate and Nova is known to cultivate an atmosphere of innovation, enc...

Industrial Research and the Science of Small Things

How does a young woman passionate about art from western India, become a nanoscale engineer in the ...

From Beach Sand to Semiconductors: How Computer Chips are Ma...

Today’s technology world, driven by digital innovation, depends critically on the manufacture of ...

Press Releases

Leading Analog Manufacturer Purchases Multiple Nova VeraFlex® Tools

Leading Analog Manufacturer Purchases Multiple Nova VeraFlex® Tools

07 Jul, 2022
Read More
Global Logic Manufacturer Selects Nova’s Latest Materials Metrology Platform

Global Logic Manufacturer Selects Nova’s Latest Materials Metrology Platform

12 Oct, 2021
Read More
Nova Introduces Unique Portfolio to Address Next-Generation Logic Fabrication Challenges

Nova Introduces Unique Portfolio to Address Next-Generation Logic Fabrication Challenges

17 Feb, 2022
Read More
Nova Receives Multiple Materials Metrology Orders from Leading Logic and Foundry Customers

Nova Receives Multiple Materials Metrology Orders from Leading Logic and Foundry Customers

28 Jan, 2021
Read More