Software Solutions
Nova software solutions provide a holistic metrology intelligence layer, rapidly interpreting complex signals, guiding robust process adjustments, and putting them into practice across the fleet with consistent governance. Our software helps fabs solve quickly, scale confidently, and act proactively, acting as a focused yet meaningful lever in achieving peak performance, across the manufacturing journey. In synergy with Nova’s unique hardware technologies, the software suite is a complete offering designed to handle complex structures for the most advanced technology nodes.
The Nova Fit® machine-learning hub leverages machine learning and data-driven algorithms to revolutionize the way customers utilize measurement data to tighten process windows, avoid process excursions and improve yield. Nova Fit® is enhanced by physical parameters from Nova MARS® and data analysis from Nova Fleet Management® to improve metrology performance, accelerate time to solution, and expand the metrology envelope for enriched process control.
Nova Hub is a comprehensive solutions suite for managing large fleets of Nova's metrology tools, providing connectivity, fast data access, and the productivity crucial to successful manufacturing in today’s complex fab environment. Nova Hub includes FleetBoost, the ultimate toolbox for quickly and efficiently getting your fleet up and running optimally, while providing real-time visibility into its measurement data. Nova Hub also includes FleetView, a comprehensive set of tools and fleet-level operational reports that enable quality performance tracking, easy troubleshooting, and smart decision-making for corrective actions.
This suite of solutions is powered by the Nova Hub Server, which provides a high-performance foundation for fleet-level metrology intelligence. Built on GPU-accelerated compute and Kubernetes automation, it reliably supports AI-driven analytics and scalable application deployment.
The Nova MARS® software package is a multi-channel metrology physical modeling engine designed for the most complex 3D structures in advanced process node fabrication.
A complete modeling solution for scatterometry model development, material characterization and recipe optimization, Nova MARS® utilizes physical and process-related knowledge to gain insight into complex structures.
The solution is enhanced with measured and analyzed data from Nova Fit® and Nova Fleet Management ®, utilizing NOVA’s high-performance computational platform (HPC) for time-to-solution optimization.
Nova QED is an offline recipe creation and data analysis platform loaded onto a Nova-provided laptop. It is equipped with a user-friendly interface to analyze spectra and optimize production recipes for Nova VeraFlex® platforms.
Nova RACS is a centrally networked server solution comprising innovative hardware and software that seamlessly integrates with a fab’s IT network to manage multiple Nova VeraFlex® systems. This is especially important in matching a fleet of tools or enabling feed-forward performance options for process flows involving repetitive layers in the film stack.
