Software Solutions
Nova’s modeling software and fleet management solutions combine physical modeling, data-driven and advanced machine learning algorithms. In synergy with Nova’s unique hardware technologies, such as the Nova Prism Spectral Interferometry, Nova Elipson® Raman, and fleet infrastructure, the software suite is a complete modeling and application development offering designed to handle complex 3D and HAR structures for the most advanced logic and memory technology nodes.
The Nova Fit® machine-learning hub leverages machine learning and data-driven algorithms to revolutionize the way customers utilize measurement data to tighten process windows, avoid process excursions and improve yield. Nova Fit® is enhanced by physical parameters from Nova MARS® and data analysis from Nova Fleet Management® to improve metrology performance, accelerate time to solution, and expand the metrology envelope for enriched process control.
Nova’s fleet infrastructure ensures the connectivity, fast access to data, and productivity crucial to successful manufacturing in today’s complex fab environment. It is a comprehensive solutions suite for managing large fleets of Nova's metrology tools. The suite includes the Nova Fleet Management® which delivers high productivity, operational efficiency, and better performance in high-volume production environments, and Nova RACS – an advanced control database server for fleet management comprising innovative hardware and software that seamlessly integrates with a fab’s IT network.
The infrastructure is empowered by Nova HPC, an advanced computational system that significantly expedites application development. The system’s advanced hardware design optimizes Nova’s proprietary algorithm performance for the most calculation-demanding application developments. When combined with the Nova software suite, the cost-effective Nova HPC accelerates recipe preparation, bringing together scalable, user-configurable infrastructure with task management software.
The Nova MARS® software package is a multi-channel metrology physical modeling engine designed for the most complex 3D structures in advanced process node fabrication.
A complete modeling solution for scatterometry model development, material characterization and recipe optimization, Nova MARS® utilizes physical and process-related knowledge to gain insight into complex structures.
The solution is enhanced with measured and analyzed data from Nova Fit® and Nova Fleet Management ®, utilizing NOVA’s high-performance computational platform (HPC) for time-to-solution optimization.
Nova QED is an offline recipe creation and data analysis platform loaded onto a Nova-provided laptop. It is equipped with a user-friendly interface to analyze spectra and optimize production recipes for Nova VeraFlex® platforms.
Nova RACS is a centrally networked server solution comprising innovative hardware and software that seamlessly integrates with a fab’s IT network to manage multiple Nova VeraFlex® systems. This is especially important in matching a fleet of tools or enabling feed-forward performance options for process flows involving repetitive layers in the film stack.
