Advanced Imaging
In addition to Nova’s specialty in spectral measurements, we also invest in assisting channels that support the main metrology module. As requirement for accuracy and speed becomes tougher with advancing technology nodes, the complexity of these channels increases. This includes advanced image processing algorithms, sophisticated navigational channels, and robust pattern recognition capabilities. To enable measurement of a required location with sub-micron-level positional accuracy, Nova also implements a combination of sophisticated hardware and software navigation aids together with highly advanced pattern recognition capabilities.


How Does it Work?
The optical resolution of typical optical microscopes is limited by light diffraction to micron-scale and above. Nova’s advanced image processing algorithms allow for greatly improved precision, significantly improving on these limitations, through prior knowledge on the measured layout. Combined with flexible, high-end HW allowing optimization of the image conditions and characteristics, accurate and reliable navigation is obtained.