Technologies Overview Materials Metrology
Secondary Ion Mass Spectrometry (SIMS)

Secondary Ion Mass Spectrometry (SIMS)

Nova Metrion® leverages secondary ion mass spectrometry (SIMS) technology to provide information that no other inline metrology system can deliver.  This includes direct, inline measurement of chemical composition at high depth resolution and data density, as well as simultaneous measurement of multiple species throughout a 300mm wafer’s film stack.  Process automation with built-in film analysis and recipe management makes the Nova Metrion® system easy to use, while performing these measurements in the production fab shortens time to results.

Secondary Ion Mass Spectrometry (SIMS)

Highlights and Benefits

Direct Composition Profiling 

Built-in Film Analysis

Full Factory Automation

Contamination Free

Whole Wafer Measurements 

Reduced Scrap and Enhanced Yield

Direct Composition Profiling 

Built-in Film Analysis

Full Factory Automation

Contamination Free

Whole Wafer Measurements 

Reduced Scrap and Enhanced Yield

Direct Composition Profiling 

Directly measures compositional profiles inline at high depth resolution and data density

Built-in Film Analysis

Simplifies measurements and accelerates process insight with built-in film analysis and recipe management

Full Factory Automation

Supports full factory automation to enable high-volume manufacturing

Contamination Free

Ensures worry-free use within contaminant-sensitive production environments

Whole Wafer Measurements 

Eliminates sample preparation and enables multi-point measurements for wafer uniformity mapping

Reduced Scrap and Enhanced Yield

Faster time to results reduces scrap and improves yield to deliver fast return on investment (ROI)

Nova VeraFlex® III

Why Inline SIMS?

Delivering time-sensitive information needed to monitor and control high-volume manufacturing (HVM) workflows, inline SIMS prevents scrap, reduces rework, and enables tighter statistical process control (SPC).

What is SIMS?

Our Blog

Nova Metrion®: Analyzing Materials Composition of Complex S...

Nova Metrion® directly measures the composition of wafer materials using Secondary Ion Mass Spectr...

Nova Metrion® Use Cases

In our companion blog post covering Metrion we explored the importance of SIMS technology for se...

Marla Fields Redefines Limits One Step Forward at a Time- an...

A good advice from her high school teacher lead Marla Fields to make a life-changing choice about h...

Press Releases

Nova Introduces Revolutionary Inline SIMS Solution

Nova Introduces Revolutionary Inline SIMS Solution

08 Dec, 2021
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Nova Introduces Unique Portfolio to Address Next-Generation Logic Fabrication Challenges

Nova Introduces Unique Portfolio to Address Next-Generation Logic Fabrication Challenges

17 Feb, 2022
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Nova Metrion® Selected by Advanced Logic Manufacturer

Nova Metrion® Selected by Advanced Logic Manufacturer

12 Jul, 2022
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Nova Receives Multiple Materials Metrology Orders from Leading Logic and Foundry Customers

Nova Receives Multiple Materials Metrology Orders from Leading Logic and Foundry Customers

28 Jan, 2021
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