Nova VeraFlex® IV

Next-generation solution for fast, high-precision inline XPS and XRF materials metrology

Nova VeraFlex® IV

Revolutionizing inline materials metrology, the Nova VeraFlex® LE-XRF product line is the industry standard for combined XPS and low energy XRF (LE-XRF) materials characterization. The most recent addition to the product line, Nova VeraFlex® IV LE-XRF addresses critical industry challenges across all device market segments. Significantly increasing X-ray flux at the measurement site for higher precision and throughput, this next-generation solution continues to extend the market leadership of the Nova VeraFlex® LE-XRF product line.

Highlights and Benefits

High Throughput

Smaller Pads

XPS/XRF Sensitivity

Automated Operation

Measurement Locations

High Throughput

Smaller Pads

XPS/XRF Sensitivity

Automated Operation

Measurement Locations

High Throughput

System enhancements have been developed for increasing X-ray flux that generates higher photoelectron count rates and faster processing. This offers substantial throughput improvements while maintaining precise measurement performance

Smaller Pads

Designed with enhanced X-ray beam alignment and control for smaller next-generation pad sizes

XPS/XRF Sensitivity

Both XPS and LE-XRF measurements can occur for inline and in-die applications simultaneously, offering unique value to the industry. Inline measurements can be taken both in the scribe line and in-die on-device

Automated Operation

Beam parameters from the electron gun and the generated X-ray beam energy are continuously monitored enabling uninterrupted operation

Measurement Locations

Measurement options on 2D pads and in-die add value by offering customers measurement location options. In-die measurements typically maintain the highest correlation to electrical performance

Nova VeraFlex® IV

Why VeraFlex® IV LE-XRF

New material integration strategies continue to drive critical device performance improvements for advanced FinFet, Nanosheets, and novel memory structures. The VeraFlex IV LE-XRF provides the highest X-ray flux available to deliver the speed, sensitivity, and flexibility necessary to enable these performance breakthroughs.

What is VeraFlex® IV?

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Press Releases

Leading Analog Manufacturer Purchases Multiple Nova VeraFlex® Tools

Leading Analog Manufacturer Purchases Multiple Nova VeraFlex® Tools

07 Jul, 2022
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Global Logic Manufacturer Selects Nova’s Latest Materials Metrology Platform

Global Logic Manufacturer Selects Nova’s Latest Materials Metrology Platform

12 Oct, 2021
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Nova Introduces Unique Portfolio to Address Next-Generation Logic Fabrication Challenges

Nova Introduces Unique Portfolio to Address Next-Generation Logic Fabrication Challenges

17 Feb, 2022
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Nova Receives Multiple Materials Metrology Orders from Leading Logic and Foundry Customers

Nova Receives Multiple Materials Metrology Orders from Leading Logic and Foundry Customers

28 Jan, 2021
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