Nova DMR®

Products Overview

Nova DMR®

Inline continuous direct metal replenishment for cleanroom environments

Nova DMR^® offers economical replenishment of metals in a plating bath. This significantly extends the bath chemicals’ lifetimes and improves plater utilization. Nova DMR^® provides fully automatic powder container docking for uninterrupted operation and eliminates the constant increase in bath volume to lower the need for bleed and feed or full bath dump. This reduces environmental impact and minimizes operational risks and costs. The platform integrates with Nova ANCOLYZER^® and directly connects to any process tool.

Highlights and Benefits

Lower Costs

Environmentally Friendly

Continuous Operation

Material Management

Better Stability and Control

Lower Costs

Environmentally Friendly

Continuous Operation

Material Management

Better Stability and Control

Lower Costs

Significantly reduces the cost of plating and waste, tool downtime, and bath exchange frequency

Environmentally Friendly

Decreases chemical exposure to reduce environmental impact and enhance health and safety conditions

Continuous Operation

Utilizes fully automated power container loader for docking and undocking to ensure uninterrupted operations

Material Management

Secures management of qualified material via RFID

Better Stability and Control

Optimizes process stability and improves process control

What is Nova DMR®?

Press Releases

ancosys Chemical Metrology Solution Selected by Additional Front-End Customer

09 Feb, 2022

Nova Expands Into Advanced Chemical Metrology With ancosys Acquisition

16 Nov, 2021

Nova Completes Acquisition of ancosys

25 Jan, 2022

Nova Introduces Unique Portfolio to Address Next-Generation Logic Fabrication Challenges

17 Feb, 2022