Nova T550®

Best CoO and full Integrated Metrology communality

The Nova T550 is a high-productivity dimensional metrology platform designed to address the unique challenges of the semiconductor manufacturing industry, delivering a highly efficient and effective solution for advanced nodes.

Highlights and Benefits

  • Highest throughput solution
  • Modular metrology platform
  • Tight accuracy, precision, and fleet matching specs
  • Full communality to the i550 integrated metrology platform
  • Robust platform – high reliability hardware architecture
  • Designed for advanced technology nodes

The Nova T550 is part of Nova’s fleet solution for semiconductor manufacturers. With full commonality and same optics design as the Nova i550 integrated metrology platform, the Nova T550 completes Nova’s unique and highly efficient offering for CMP and Etch metrology and process control.

The Nova T550 high productivity and excellent metrology performance enable increased sampling rates and high-performance film thickness and Optical CD metrology capabilities for advanced nodes. Its robust architecture delivers extremely low variability and superior tool-to-tool matching.

The Nova T550 platform is supported by Nova’s central management, control and connectivity suite for boosted operational efficiency and advanced metrology control functionality.