Nova ANCOSCENE™ is an industry-standard chemical metrology solution for Damascene copper plating interconnect applications. The solution has been qualified by leading global manufacturers for operation in advanced nodes’ production processes. Nova ANCOSCENE™ supports a continuously growing range of copper baths and applications and offers a fully automated analysis of bath components, process alarms and warnings, and overall process control. Nova ANCOSCENE™ conducts fast and flexible analyses with automatic validation and calibration. The analyzer ensures smooth operation without requiring unique and expensive calibration solutions and chemicals.
The core design elements, safety features, and critical functionalities of Nova ANCOSCENE™ focus on streamlining operations and maintenance to minimize the cost of ownership. These elements include non-reagent analysis, high process availability, and an optimized layout that reduce chemical use and waste generation.