Nova AncoScene™

Fast, automated analysis for front-end interconnect metallization applications

Nova AncoScene™

Nova AncoScene™ is an industry-standard chemical metrology solution for Damascene copper plating interconnect applications. The solution has been qualified by leading global manufacturers for operation in advanced nodes’ production processes. Nova AncoScene™ supports a continuously growing range of copper baths and applications and offers a fully automated analysis of bath components, process alarms and warnings, and overall process control. Nova AncoScene™ conducts fast and flexible analyses with automatic validation and calibration. The analyzer ensures smooth operation without requiring unique and expensive calibration solutions and chemicals.

Highlights and Benefits

Automated Analysis

Highest Accuracy

Enhanced Process Availability

Network Integration

Lower Fab Space

Low COO

Automated Analysis

Highest Accuracy

Enhanced Process Availability

Network Integration

Lower Fab Space

Low COO

Automated Analysis

Carries out fast and flexible analysis of copper damascene bath components and process control via automatic validation and calibration

Highest Accuracy

Delivers the market's highest accuracy and reproducibility

Enhanced Process Availability

Enhanced process availability by a chemical management system

Network Integration

Communicates with all plating tools, and fully integrates with the fab communications network

Lower Fab Space

Optimally designed to require only front access for reduced tool footprint

Low COO

Streamlines operations and maintenance to minimize the cost of ownership

Nova AncoScene™

The core design elements, safety features, and critical functionalities of Nova AncoScene™ focus on streamlining operations and maintenance to minimize the cost of ownership. These elements include non-reagent analysis, high process availability, and an optimized layout that reduce chemical use and waste generation.

What is Nova AncoScene™

You Might be Interested in

Demonstrating a DNA of InNOVAtion

There are Infinite ways to innovate and Nova is known to cultivate an atmosphere of innovation, enc...

Nova– a Journey of Innovation

At Nova, a leading semiconductor metrology provider, innovation is a top value both as a strategy a...

How Did the Name Kaufman Turn into a Synonym to InNOVAtion a...

At Nova, 'Kaufman', became a synonym for innovation and groundbreaking ideas. So, you would hear peo...

Press Releases

ancosys Chemical Metrology Solution Selected by Additional Front-End Customer

ancosys Chemical Metrology Solution Selected by Additional Front-End Customer

09 Feb, 2022
Read More
Nova Expands Into Advanced Chemical Metrology With ancosys Acquisition

Nova Expands Into Advanced Chemical Metrology With ancosys Acquisition

16 Nov, 2021
Read More
Nova Completes Acquisition of ancosys

Nova Completes Acquisition of ancosys

25 Jan, 2022
Read More
IBM Research and Nova Jointly Awarded the “Best Metrology Paper” at SPIE Advanced Lithography Conference

IBM Research and Nova Jointly Awarded the “Best Metrology Paper” at SPIE Advanced Lithography Conference

26 Apr, 2022
Read More