The Nova MARS® software package is a multi-channel physical modeling engine designed for complex 2D/3D devices in advanced process node fabrication. A complete solution for scatterometry model development, material characterization, and recipe optimization, Nova MARS® utilizes physical and process-related knowledge to solve CD applications in complex structures.
The solution offers comprehensive capabilities that combine physical, machine learning, and hybrid modeling, as well as disruptive algorithms. This rich and diverse “solution toolbox” allows semiconductor manufacturers to flexibly solve ever-growing complex metrology challenges based on their unique requirements and needs.
Nova MARS supports Nova’s leading dimensional metrology tools, and works in seamless connectivity with Nova HPC and Nova Hub.
Why Nova MARS®?
As production for advanced process nodes becomes increasingly complex, IC manufacturers need a comprehensive solution that is both accurate and productive to keep them competitive.
Nova MARS®, complemented by Nova HPC, breaks a longstanding paradigm. Manufacturers of advanced 3D structures, such as FinFET, GAA, 3D NAND, and DRAM, no longer need to sacrifice accuracy or productivity. Instead, they can leverage the combined offering to increase robustness and accuracy, improve productivity, expand their range of edge applications, and achieve faster time-to-solution.
Nova MARS® leverages advanced, unique algorithms to optimize the speed and accuracy of optical CD calculations, library generation, and automatic channel selection. When combined with advanced machine learning algorithms, which maximize signal information, and with Nova HPC, Nova MARS® offers a complete optical CD metrology solution for Nova’s leading dimensional metrology tools.
Designed for scatterometry models, Nova MARS® StackMaker provides an intuitive drag-and-drop interface for visualizing the most complex 3D device geometries. This simple yet powerful approach makes it easy for users to create new models and implement design and process changes into existing models while tracking the design evolution.
Nova MARS® MatMaker is a material characterization package featuring a significantly faster regression engine that rapidly converges to the correct materials and solution parameters.
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