Nova ANCOLYZER®

Products Overview

Nova ANCOLYZER®

Market-leading chemical metrology platform for backend and advanced packaging

Nova ANCOLYZER^® is an industry-standard fully automated online chemical metrology platform for advanced packaging processes. Nova ANCOLYZER^® offers superior analytical performance and supports a wide variety of analytical techniques for process control. The platform is designed with the most flexible and scalable architecture that can be configured to specific process analysis and replenishment requirements. Nova ANCOLYZER^® offers superior accuracy and precision coupled with uncompromising reliability and the highest availability.

Highlights and Benefits

Fully Automated

Flexible, Open Architecture

Data Access

Communication Interface

Smaller Fab Space

Fully Automated

Flexible, Open Architecture

Data Access

Communication Interface

Smaller Fab Space

Fully Automated

Automates process analysis and replenishment and carries out self-monitoring and diagnostics for failure detection via automatic validation and calibration, while offering the highest market availability

Flexible, Open Architecture

Leverages open architecture to fully meet customer requirements

Data Access

Maintains complete access to collected data for better characterization, troubleshooting, and process improvement

Communication Interface

Communicates with all plating tools, and fully integrates with the fab communications network

Smaller Fab Space

Optimally designed to require only front access for reduced tool footprint

The core design elements, safety features, and critical functions of Nova ANCOLYZER^® focus on streamlining operations and maintenance to minimize the cost of ownership. These elements include non-reagent analysis and an optimized layout to enhance process availability.

What is Nova ANCOLYZER®

Press Releases

ancosys Chemical Metrology Solution Selected by Additional Front-End Customer

09 Feb, 2022

Nova Expands Into Advanced Chemical Metrology With ancosys Acquisition

16 Nov, 2021

Nova Completes Acquisition of ancosys

25 Jan, 2022

IBM Research and Nova Jointly Awarded the “Best Metrology Paper” at SPIE Advanced Lithography Conference

26 Apr, 2022