Technologies Overview Materials Metrology
X-Ray Fluorescence (XRF)

X-Ray Fluorescence (XRF)

The Nova VERAFLEX® XF product line is equipped with unique, low-energy XRF capabilities. Both XPS and XRF signals are measured simultaneously from the same incident X-ray source.

X-Ray Fluorescence (XRF)

Highlights and Benefits

Thin-Film Elemental Analysis

Accurate Chemical Identification

Thickness and Composition Data

Thin-Film Elemental Analysis

Accurate Chemical Identification

Thickness and Composition Data

Thin-Film Elemental Analysis

Conducts elemental analysis of material properties from both the surface and depth of thin films

Accurate Chemical Identification

Precisely identifies chemical elements via secondary electron emission analysis

Thickness and Composition Data

Delivers simultaneous, film thickness and composition data without correlation

Nova VERAFLEX® III

Why XRF?

XRF technology provides an additional channel of elemental information based on analysis of secondary electron X-ray emissions from the sample.

How it Works?

The photoelectric effect can impact additional interactions of light and matter. The removal of an inner shell electron resulting from an energetic incident X-ray renders electronic structure instability for the analyzed material. Since each element has electronic orbitals of characteristic energies, there is a finite number of ways in which the unstable vacancy can be filled. If it is filled by a higher shell electron, the difference in shell energy is released as a photon (i.e. X-ray). Analysis of this secondary X-ray emission, or X-ray fluorescence, is known as XRF.

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Leading Analog Manufacturer Purchases Multiple Nova VERAFLEX® Tools

07 Jul, 2022
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Global Logic Manufacturer Selects Nova’s Latest Materials Metrology Platform

12 Oct, 2021
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28 Jan, 2021
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