Technologies Overview Materials Metrology
X-Ray Fluorescence (XRF)

X-Ray Fluorescence (XRF)

The Nova VERAFLEX® XF product line is equipped with unique, low-energy XRF capabilities. Both XPS and XRF signals are measured simultaneously from the same incident X-ray source.

X-Ray Fluorescence (XRF)

Highlights and Benefits

Thin-Film Elemental Analysis

Accurate Chemical Identification

Thickness and Composition Data

Thin-Film Elemental Analysis

Accurate Chemical Identification

Thickness and Composition Data

Thin-Film Elemental Analysis

Conducts elemental analysis of material properties from both the surface and depth of thin films

Accurate Chemical Identification

Precisely identifies chemical elements via secondary electron emission analysis

Thickness and Composition Data

Delivers simultaneous, film thickness and composition data without correlation

Nova VERAFLEX® III

Why XRF?

XRF technology provides an additional channel of elemental information based on analysis of secondary electron X-ray emissions from the sample.

How it Works?

The photoelectric effect can impact additional interactions of light and matter. The removal of an inner shell electron resulting from an energetic incident X-ray renders electronic structure instability for the analyzed material. Since each element has electronic orbitals of characteristic energies, there is a finite number of ways in which the unstable vacancy can be filled. If it is filled by a higher shell electron, the difference in shell energy is released as a photon (i.e. X-ray). Analysis of this secondary X-ray emission, or X-ray fluorescence, is known as XRF.

Our Blog

Demonstrating a DNA of InNOVAtion

There are Infinite ways to innovate and Nova is known to cultivate an atmosphere of innovation, enc...

Nova Introduces Nova METRION®- our New in-line SIMS Product...

Dr. Shay Wolfling, Nova's CTO is proud to introduce the Nova METRION®- our new in-line SIMS product...

How Did the Name Kaufman Turn into a Synonym to InNOVAtion a...

At Nova, 'Kaufman', became a synonym for innovation and groundbreaking ideas. So, you would hear peo...

Press Releases

Leading Analog Manufacturer Purchases Multiple Nova VERAFLEX® Tools

Leading Analog Manufacturer Purchases Multiple Nova VERAFLEX® Tools

07 Jul, 2022
Read More
Global Logic Manufacturer Selects Nova’s Latest Materials Metrology Platform

Global Logic Manufacturer Selects Nova’s Latest Materials Metrology Platform

12 Oct, 2021
Read More
Nova Receives Multiple Materials Metrology Orders from Leading Logic and Foundry Customers

Nova Receives Multiple Materials Metrology Orders from Leading Logic and Foundry Customers

28 Jan, 2021
Read More
Nova Introduces Unique Portfolio to Address Next-Generation Logic Fabrication Challenges

Nova Introduces Unique Portfolio to Address Next-Generation Logic Fabrication Challenges

17 Feb, 2022
Read More

Our Publications

Filter By Years
2023
2022
2021
2020
2019
Authored by: Daniel Doutt*a, Ping-ju Chena, Bhargava Ravooria, Tuyen K. Trana, Eitan Rothsteinb, Nir Kampelb, Lilach Tamamb, Effi Aboodyb, Avron Gerb, Harindra Vedalac
TSV stress evolution mapping using in-line Raman spectroscopy
April 27 2023
@
SPIE Advanced Lithography + Patterning
Authored by: Stefan Schoeche, Daniel Schmidt, Marjorie Cheng, Aron Cepler, Abraham Arceo de la Pena, Jennifer Oakley
Authored by: A. Moussa, J. Bogdanowicz, B. Groven, P. Morin, M. Beggiato, M. Saib, G. Santoro, Y. Abramovitz, K. Houtchens, S. Ben Nissim, N. Meir, J. Hung, A. Urbanowicz, R. Koret, I. Turovets, G. F. Lorusso, A.-L. Charley
Authored by: Benjamin Hickey, Wei Ti Li, Sarah Okada, Lawrence Rooney, Feng Zhang
Authored by: Benjamin Hickey, Wei Ti Li, Sarah Okada, Lawrence Rooney, Feng Zhang
Authored by: Julia Hoffman, Sarah Okada, Lawrence Rooney, Bruno Schueler, Ganesh Vanamu