Raman Spectroscopy

Nova Elipson™ leverages Raman spectroscopy, a vibrational spectroscopy technique to detect material properties such as strain, crystallinity, phases, grain size, and composition. A non-destructive optical method, Raman spectroscopy combines small spot size and high speed to serve as the metrology of choice for the memory and logic segments.

Highlights and Benefits

Non-Destructive

Small Spot Size

Single Platform

Non-Destructive

Small Spot Size

Single Platform

Non-Destructive

Leverages fast, non-destructive optical technique suitable for materials metrology

Small Spot Size

Combines small spot size and high speed for in-die analysis of 3D structures

Single Platform

Performs single measurement to characterize strain, crystallinity, phase, and composition

Nova VeraFlex® IV

Why Raman Spectroscopy?

The Raman spectrum provides direct information of the vibrational properties, which are highly sensitive to various material parameters. Translation of the measured spectrum into metrology parameters of interest is based on either empirical rules, model-based methods, or machine learning approaches.

Raman spectroscopy has been known for many years as a suitable lab technology for R&D needs. With Nova Elipson™, Nova has taken this technology one step further into the fab.

How it Works?

Raman spectroscopy relies on inelastic scattering of photons, whereby light interacts with vibrational excitations (phonons). The vibrational modes of the probed material either absorb or enhance the incident photon energy, leading to a wavelength shift of the scattered light. Nova uses Raman spectroscopy to measure the degree of the wavelength shift and interoperate it with the material’s properties.

What is Raman Spectroscopy?

Our Blog

Raman Based Metrology for Leading-Edge Semiconductor Nodes

Over the recent years, a revolution is brewing in the semiconductor industry. The long-standing tr...

Nova– a Journey of Innovation

At Nova, a leading semiconductor metrology provider, innovation is a top value both as a strategy a...

Demonstrating a DNA of InNOVAtion

There are Infinite ways to innovate and Nova is known to cultivate an atmosphere of innovation, enc...

Press Releases

Nova Expands Adoption of Elipson for Advanced Memory Devices

Nova Expands Adoption of Elipson for Advanced Memory Devices

30 Sep, 2021
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IBM Research and Nova Jointly Awarded the “Best Metrology Paper” at SPIE Advanced Lithography Conference

IBM Research and Nova Jointly Awarded the “Best Metrology Paper” at SPIE Advanced Lithography Conference

26 Apr, 2022
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Nova Introduces Unique Portfolio to Address Next-Generation Logic Fabrication Challenges

Nova Introduces Unique Portfolio to Address Next-Generation Logic Fabrication Challenges

17 Feb, 2022
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Nova Metrion® Selected by Advanced Logic Manufacturer

Nova Metrion® Selected by Advanced Logic Manufacturer

12 Jul, 2022
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Authored by: Jaesuk Yoona, Jongmin Parka, Minjung Shina, and Dongchul Ihma, Oshrat Bismuthb, Smadar Ferberb, Jacob Ofekb, Igor Turovetsb, Isaac Kim, aFlash Process Development Team MI, Samsung R&D Center, Hwaseong, Korea, NOVA Ltd, Rehovot, Israel, Nova Measuring Instruments Korea Ltd., Gyeonggi-do, Korea.
Authored by: Jun Chen, Xinheng Jiang, Keisuke Goto, Takashi Tsutsumi, Yasutaka Toyoda Hitachi High-tech Corp.,
Authored by: Stefan Schoeche, Daniel Schmidt, Junwon Han, Shahid Butt, Katherine Sieg, Marjorie Cheng, Aron Cepler, Shaked Dror, Jacob Ofek, Ilya Osherov, and Igor Turovetsc IBM Research, 257 Fuller Road, Albany, NY 12203, USA Nova Measuring Instruments Inc., 3342 Gateway Blvd, Fremont, CA 94538, USA Nova Ltd., 5 David Fikes St., Rehovot, 7632805, Israel
Authored by: Authored by: Daniel SchmidtiD ,a,* Manasa Medikonda,a Michael Rizzolo,a Claire Silvestre,a Julien Frougier,a Andrew Greene,a Mary Breton,a Aron Cepler,b Jacob Ofek,c Itzik Kaplan,c Roy Koret,c and Igor Turovetsc