The Nova ELIPSON™ product line utilizes Raman spectroscopy, a vibrational spectroscopy technique, to detect multiple material properties such as strain, crystallinity, phases, grain size and composition. The combination of a small spot and high speed of this non-destructive, optical method makes it a metrology of choice for both memory and logic segments
Highlights and Benefits
- Fast and non-destructive optical technique for material metrology
- Small spot for in-die analysis of 3D structures
- A single platform providing characterization of multiple parameters – strain, crystallinity, phase and composition – in a single measurement
Raman spectroscopy relies upon inelastic scattering of photons, in which light interacts with vibrational excitations (phonons). Vibrational modes of the probed material either absorb or enhance the incident photon energy, resulting in a wavelength shift of the scattered light. The Raman spectrum provides direct information on these vibrational properties, which are highly sensitive to various material parameters. Interpretation of the measured spectrum into metrology parameters of interest can be based on empirical rules, model-based or machine learning approaches.
Raman spectroscopy has been known for many years as a suitable lab technology for R&D needs. Now, Nova has taken this technology one step further, into the Fab, with Nova ELIPSON™.