Raman Spectroscopy

Nova ELIPSON™ leverages Raman spectroscopy, a vibrational spectroscopy technique to detect material properties such as strain, crystallinity, phases, grain size, and composition. A non-destructive optical method, Raman spectroscopy combines small spot size and high speed to serve as the metrology of choice for the memory and logic segments.

Raman Spectroscopy

Highlights and Benefits

Non-Destructive

Small Spot Size

Single Platform

Non-Destructive

Small Spot Size

Single Platform

Non-Destructive

Leverages fast, non-destructive optical technique suitable for materials metrology

Small Spot Size

Combines small spot size and high speed for in-die analysis of 3D structures

Single Platform

Performs single measurement to characterize strain, crystallinity, phase, and composition

Nova VERAFLEX® IV

Why Raman Spectroscopy?

The Raman spectrum provides direct information of the vibrational properties, which are highly sensitive to various material parameters. Translation of the measured spectrum into metrology parameters of interest is based on either empirical rules, model-based methods, or machine learning approaches.

Raman spectroscopy has been known for many years as a suitable lab technology for R&D needs. With Nova ELIPSON™, Nova has taken this technology one step further into the fab.

How it Works?

Raman spectroscopy relies on inelastic scattering of photons, whereby light interacts with vibrational excitations (phonons). The vibrational modes of the probed material either absorb or enhance the incident photon energy, leading to a wavelength shift of the scattered light. Nova uses Raman spectroscopy to measure the degree of the wavelength shift and interoperate it with the material’s properties.

What is Raman Spectroscopy?

Our Blog

Raman Based Metrology for Leading-Edge Semiconductor Nodes

Over the recent years, a revolution is brewing in the semiconductor industry. The long-standing tr...

Nova– a Journey of Innovation

At Nova, a leading semiconductor metrology provider, innovation is a top value both as a strategy a...

Demonstrating a DNA of InNOVAtion

There are Infinite ways to innovate and Nova is known to cultivate an atmosphere of innovation, enc...

Press Releases

Nova Expands Adoption of ELIPSON for Advanced Memory Devices

Nova Expands Adoption of ELIPSON for Advanced Memory Devices

30 Sep, 2021
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IBM Research and Nova Jointly Awarded the “Best Metrology Paper” at SPIE Advanced Lithography Conference

IBM Research and Nova Jointly Awarded the “Best Metrology Paper” at SPIE Advanced Lithography Conference

26 Apr, 2022
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Nova Introduces Unique Portfolio to Address Next-Generation Logic Fabrication Challenges

Nova Introduces Unique Portfolio to Address Next-Generation Logic Fabrication Challenges

17 Feb, 2022
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Nova METRION® Selected by Advanced Logic Manufacturer

Nova METRION® Selected by Advanced Logic Manufacturer

12 Jul, 2022
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Authored by: Authored by: Daniel SchmidtiD ,a,* Manasa Medikonda,a Michael Rizzolo,a Claire Silvestre,a Julien Frougier,a Andrew Greene,a Mary Breton,a Aron Cepler,b Jacob Ofek,c Itzik Kaplan,c Roy Koret,c and Igor Turovetsc
Authored by: Daniel Doutt*a, Ping-ju Chena, Bhargava Ravooria, Tuyen K. Trana, Eitan Rothsteinb, Nir Kampelb, Lilach Tamamb, Effi Aboodyb, Avron Gerb, Harindra Vedalac
TSV stress evolution mapping using in-line Raman spectroscopy
April 27 2023
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SPIE Advanced Lithography + Patterning
Authored by: Stefan Schoeche, Daniel Schmidt, Marjorie Cheng, Aron Cepler, Abraham Arceo de la Pena, Jennifer Oakley
Authored by: A. Moussa, J. Bogdanowicz, B. Groven, P. Morin, M. Beggiato, M. Saib, G. Santoro, Y. Abramovitz, K. Houtchens, S. Ben Nissim, N. Meir, J. Hung, A. Urbanowicz, R. Koret, I. Turovets, G. F. Lorusso, A.-L. Charley
Authored by: Benjamin Hickey, Wei Ti Li, Sarah Okada, Lawrence Rooney, Feng Zhang
Authored by: Benjamin Hickey, Wei Ti Li, Sarah Okada, Lawrence Rooney, Feng Zhang
Authored by: Julia Hoffman, Sarah Okada, Lawrence Rooney, Bruno Schueler, Ganesh Vanamu