Nova T500®

The Nova T500 is a high-productivity metrology platform designed to address the unique challenges of the semiconductor manufacturing industry. This powerful platform delivers increased sampling rates and advanced metrology capabilities for 28 nm and below.

Highlights and Benefits

  • Fab productivity – Highest throughput solution
  • Modular Metrology platform
  • Fleet ready – Superior tool-to-tool matching
  • Robust platform – High reliability hardware architecture
  • Unique capabilities – Thick layer measurement


The Nova T500 platform is part of Nova’s fleet solution for semiconductor manufacturers. With full commonality and same optics design as the Nova i500 integrated metrology platform, the Nova T500 completes Nova’s unique and highly efficient offering for CMP metrology and process control.

The Nova T500 platform provides unique capabilities of thick layer measurement (TLM), enabling solutions for applications requiring accurate, repetitive measurements of thick films, such as in CMOS image sensor BSI CMP applications.

The Nova T500 platform can support 2 measuring units, delivering extremely high throughput while providing consistently high-accuracy measurements. The advanced platform enables high-end Integrated Circuits (IC) manufacturers to increase metrology sampling and improve metrology precision, while reducing metrology cost of ownership (CoO).

The Nova T500 platform is supported by Nova’s central management, control and connectivity suite for boosted operational efficiency and advanced metrology control functionality.