Nova T500® is a high-productivity metrology platform designed to address the unique challenges of the semiconductor manufacturing industry. The powerful platform delivers increased sampling rates and advanced metrology capabilities.
Why Nova T500®?
Nova T500® helps manufacturers meet the growing need for high productivity in advanced semiconductor manufacturing. Featuring the same optical design and having full commonality with the Nova i500® integrated metrology platform, Nova T500® completes the company’s unique, highly efficient CMP metrology and process control offering.
As part of Nova’s fleet solution for semiconductor manufacturers, Nova T500® is qualified to support a broad range of tools, including Nova i500®, and is available in multiple configurations.
When supported by Nova’s central management, control and connectivity suite, Nova T500® platform enhances operational efficiency and advanced metrology control functionality.