Technologies overview

Masters of Disruptive Thinking and Innovative Technologies

Nova’s state-of-the-art metrology solutions are based on multiple advanced technologies in various fields of expertise, including Optical Scatterometry, x-ray photoelectron spectroscopy (XPS), x-ray fluorescence (XRF), Raman, SIMS, Titration, Optical Spectrophotometry, HPLC, CVS, scatterometry modeling software and high-performance computing.

Pioneers in Industrializing Emerging Dimensional Metrology Solutions

Nova’s advanced multidisciplinary dimensional metrology technologies combine complex opto-mechanical hardware with advanced optics and leading-edge algorithms to improve process performance, enhance product yield, and accelerate time to market

Spectral Interferometry

Optical Scatterometry

Advanced Imaging

Innovative Material Metrology

Bringing to the fab a broad spectrum of technologies previously available only in laboratories, Nova’s inline materials metrology technologies eliminate the need for lab-based reference metrology. This leads to reduced manufacturing downtime and faster time to market as well as enhanced data quality and higher yield.

Secondary Ion Mass Spectrometry (SIMS)

X-Ray Photoelectron Spectroscopy (XPS)

X-Ray Fluorescence (XRF)

Raman Spectroscopy

Rich, Industry-Standard Chemical Analysis

Nova’s flexible architecture solutions support the largest variety of instruments and numerous analysis techniques that are installed together to power up process control for maximal performance

Titration

Optical Spectrophotometry

High-Performance Liquid Chromatography (HPLC)

Cyclic Voltammetric Stripping (CVS)

Deep Software Modeling Process Insight

Nova’s cutting-edge metrology software modeling technologies include model-based, machine learning, advanced hybrid metrology, and big data analysis algorithms that enable high performance metrology and deliver breakthrough performance in time to solution and accuracy for the most complex 3D structures