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Technologies overview

Masters of Disruptive Thinking and Innovative Technologies

Nova’s state-of-the-art metrology solutions are based on multiple advanced technologies in various fields of expertise, including Optical Scatterometry, x-ray photoelectron spectroscopy (XPS), x-ray fluorescence (XRF), Raman, SIMS, Titration, Optical Spectrophotometry, HPLC, CVS, scatterometry modeling software and high-performance computing.

Dimensional Metrology

Dimensional Metrology

Dimensional MetrologyDimensional MetrologyMaterials MetrologyMaterials MetrologyChemical MetrologyChemical MetrologySoftware SolutionsSoftware Solutions

Pioneers in Industrializing Emerging Dimensional Metrology Solutions

Nova’s advanced multidisciplinary dimensional metrology technologies combine complex opto-mechanical hardware with advanced optics and leading-edge algorithms to improve process performance, enhance product yield, and accelerate time to market

Spectral Interferometry
Spectral Interferometry
Optical Scatterometry
Optical Scatterometry
Advanced Imaging
Advanced Imaging
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Innovative Material Metrology

Bringing to the fab a broad spectrum of technologies previously available only in laboratories, Nova’s inline materials metrology technologies eliminate the need for lab-based reference metrology. This leads to reduced manufacturing downtime and faster time to market as well as enhanced data quality and higher yield.

Secondary Ion Mass Spectrometry (SIMS)
Secondary Ion Mass Spectrometry (SIMS)
X-Ray Photoelectron Spectroscopy (XPS)
X-Ray Photoelectron Spectroscopy (XPS)
X-Ray Fluorescence (XRF)
X-Ray Fluorescence (XRF)
Raman Spectroscopy
Raman Spectroscopy
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Rich, Industry-Standard Chemical Analysis

Nova’s flexible architecture solutions support the largest variety of instruments and numerous analysis techniques that are installed together to power up process control for maximal performance

Titration
Titration
Optical Spectrophotometry
Optical Spectrophotometry
High-Performance Liquid Chromatography (HPLC)
High-Performance Liquid Chromatography (HPLC)
Cyclic Voltammetric Stripping (CVS)
Cyclic Voltammetric Stripping (CVS)
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Deep Software Modeling Process Insight

Nova’s cutting-edge metrology software modeling technologies include model-based, machine learning, advanced hybrid metrology, and big data analysis algorithms that enable high performance metrology and deliver breakthrough performance in time to solution and accuracy for the most complex 3D structures

Physical Modeling
Physical Modeling
High Performance Computing (HPC)
High Performance Computing (HPC)
­­Machine Learning
­­Machine Learning
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