Technologies Overview Chemical Metrology
Optical Spectrophotometry

Optical Spectrophotometry

Nova’s analyzers leverage optical spectrophotometry, a quantitative analysis technique using light to directly measure component concentrations in a plating solution. The highly accurate and fast method combines spectrometry, the measurement of the spectrum, and photometry, the measurement of light absorption at one or several wavelengths. Requiring little maintenance, optical spectrophotometry covers multiple parts of the electromagnetic spectrum, such as UV (ultraviolet) wavelengths of 200nm-400nm and VIS (visible light) wavelengths of 400nm-800nm respectively.

Optical Spectrophotometry

Highlights and Benefits

High Accuracy
Non-Destructive
Robust and Fast
Flexible
Flexible and Extendable
Low Maintenance
High Accuracy
Non-Destructive
Robust and Fast
Flexible
Flexible and Extendable
Low Maintenance
High Accuracy

Directly measures light-absorbing components with high accuracy

Non-Destructive

Executes non-destructive, non-reagent (NRA) measurements

Robust and Fast

Advanced electronics and computer algorithms enhance speed and accuracy

Flexible

Chemistry optimized wavelength and path length

Flexible and Extendable

Covers a wide range of concentrations from ppb to g/L

Low Maintenance

Requires little maintenance

Optical Spectrophotometry

With optical spectrophotometry, it is also possible to modify or extend the measurement of components that do not absorb light. This is done through a derivatization technique, where a chemical reaction is created to transform the components into a measurable state, prior to the analysis.

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ancosys Chemical Metrology Solution Selected by Additional Front-End Customer

ancosys Chemical Metrology Solution Selected by Additional Front-End Customer

09 Feb, 2022
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16 Nov, 2021
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Nova Completes Acquisition of ancosys

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25 Jan, 2022
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IBM Research and Nova Jointly Awarded the “Best Metrology Paper” at SPIE Advanced Lithography Conference

26 Apr, 2022
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