Technologies Overview Chemical Metrology
Optical Spectrophotometry

Optical Spectrophotometry

Nova’s analyzers leverage optical spectrophotometry, a quantitative analysis technique using light to directly measure component concentrations in a plating solution. The highly accurate and fast method combines spectrometry, the measurement of the spectrum, and photometry, the measurement of light absorption at one or several wavelengths. Requiring little maintenance, optical spectrophotometry covers multiple parts of the electromagnetic spectrum, such as UV (ultraviolet) wavelengths of 200nm-400nm and VIS (visible light) wavelengths of 400nm-800nm respectively.

Spectrometry diagram

Highlights and Benefits

High Accuracy

Non-Destructive

Robust and Fast

Flexible

Flexible and Extendable

Low Maintenance

High Accuracy

Non-Destructive

Robust and Fast

Flexible

Flexible and Extendable

Low Maintenance

High Accuracy

Directly measures light-absorbing components with high accuracy

Non-Destructive

Executes non-destructive, non-reagent (NRA) measurements

Robust and Fast

Advanced electronics and computer algorithms enhance speed and accuracy

Flexible

Chemistry optimized wavelength and path length

Flexible and Extendable

Covers a wide range of concentrations from ppb to g/L

Low Maintenance

Requires little maintenance

Optical Spectrophotometry

With optical spectrophotometry, it is also possible to modify or extend the measurement of components that do not absorb light. This is done through a derivatization technique, where a chemical reaction is created to transform the components into a measurable state, prior to the analysis.

You Might Also Be Interested In

Demonstrating a DNA of InNOVAtion

There are Infinite ways to innovate and Nova is known to cultivate an atmosphere of innovation, enc...

Nova– a Journey of Innovation

At Nova, a leading semiconductor metrology provider, innovation is a top value both as a strategy a...

How Did the Name Kaufman Turn into a Synonym to InNOVAtion a...

At Nova, 'Kaufman', became a synonym for innovation and groundbreaking ideas. So, you would hear peo...

Press Releases

ancosys Chemical Metrology Solution Selected by Additional Front-End Customer

ancosys Chemical Metrology Solution Selected by Additional Front-End Customer

09 Feb, 2022
Read More
Nova Expands Into Advanced Chemical Metrology With ancosys Acquisition

Nova Expands Into Advanced Chemical Metrology With ancosys Acquisition

16 Nov, 2021
Read More
Nova Completes Acquisition of ancosys

Nova Completes Acquisition of ancosys

25 Jan, 2022
Read More
IBM Research and Nova Jointly Awarded the “Best Metrology Paper” at SPIE Advanced Lithography Conference

IBM Research and Nova Jointly Awarded the “Best Metrology Paper” at SPIE Advanced Lithography Conference

26 Apr, 2022
Read More

Our Publications

Filter By Years
2023
2022
2021
2020
2019
Authored by: Authored by: Daniel SchmidtiD ,a,* Manasa Medikonda,a Michael Rizzolo,a Claire Silvestre,a Julien Frougier,a Andrew Greene,a Mary Breton,a Aron Cepler,b Jacob Ofek,c Itzik Kaplan,c Roy Koret,c and Igor Turovetsc
Authored by: Daniel Doutt*a, Ping-ju Chena, Bhargava Ravooria, Tuyen K. Trana, Eitan Rothsteinb, Nir Kampelb, Lilach Tamamb, Effi Aboodyb, Avron Gerb, Harindra Vedalac
TSV stress evolution mapping using in-line Raman spectroscopy
April 27 2023
@
SPIE Advanced Lithography + Patterning
Authored by: Stefan Schoeche, Daniel Schmidt, Marjorie Cheng, Aron Cepler, Abraham Arceo de la Pena, Jennifer Oakley
Authored by: A. Moussa, J. Bogdanowicz, B. Groven, P. Morin, M. Beggiato, M. Saib, G. Santoro, Y. Abramovitz, K. Houtchens, S. Ben Nissim, N. Meir, J. Hung, A. Urbanowicz, R. Koret, I. Turovets, G. F. Lorusso, A.-L. Charley
Authored by: Benjamin Hickey, Wei Ti Li, Sarah Okada, Lawrence Rooney, Feng Zhang
Authored by: Benjamin Hickey, Wei Ti Li, Sarah Okada, Lawrence Rooney, Feng Zhang
Authored by: Julia Hoffman, Sarah Okada, Lawrence Rooney, Bruno Schueler, Ganesh Vanamu