Technologies Overview Chemical Metrology
Optical Spectrophotometry

Optical Spectrophotometry

Nova’s analyzers leverage optical spectrophotometry, a quantitative analysis technique using light to directly measure component concentrations in a plating solution. The highly accurate and fast method combines spectrometry, the measurement of the spectrum, and photometry, the measurement of light absorption at one or several wavelengths. Requiring little maintenance, optical spectrophotometry covers multiple parts of the electromagnetic spectrum, such as UV (ultraviolet) wavelengths of 200nm-400nm and VIS (visible light) wavelengths of 400nm-800nm respectively.

Spectrometry diagram

Highlights and Benefits

High Accuracy

Non-Destructive

Robust and Fast

Flexible

Flexible and Extendable

Low Maintenance

High Accuracy

Non-Destructive

Robust and Fast

Flexible

Flexible and Extendable

Low Maintenance

High Accuracy

Directly measures light-absorbing components with high accuracy

Non-Destructive

Executes non-destructive, non-reagent (NRA) measurements

Robust and Fast

Advanced electronics and computer algorithms enhance speed and accuracy

Flexible

Chemistry optimized wavelength and path length

Flexible and Extendable

Covers a wide range of concentrations from ppb to g/L

Low Maintenance

Requires little maintenance

Optical Spectrophotometry

With optical spectrophotometry, it is also possible to modify or extend the measurement of components that do not absorb light. This is done through a derivatization technique, where a chemical reaction is created to transform the components into a measurable state, prior to the analysis.

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ancosys Chemical Metrology Solution Selected by Additional Front-End Customer

09 Feb, 2022
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Nova Expands Into Advanced Chemical Metrology With ancosys Acquisition

16 Nov, 2021
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Nova Completes Acquisition of ancosys

Nova Completes Acquisition of ancosys

25 Jan, 2022
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IBM Research and Nova Jointly Awarded the “Best Metrology Paper” at SPIE Advanced Lithography Conference

26 Apr, 2022
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