Publications

Optimization of Scatterometry Measurements by Enhancing with Machine Learning

April 2024

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Authored by: Sasmita Srichandan, Franz Heider, Georg Ehrentraut, Stephan Lilje, Christian Putzi, Sanja Radosavljevic, Egidijus Sakalauskas

On-Cell Thickness Monitoring of Chalcogenide Alloy Layer usingSpectral Interferometry, Raman spectroscopy, and Hybrid Machine Learning

April 2024

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Authored by: Hyunwoo Ryoo*a, Seul Ji Songb, Min Ji Jeona, Juhyun Moonb, JiHye Leea, ByungHyun Hwanga, Jeongho Ahna, Yoon-jong Songb, Hidong Kwaka, Lior Neemanc, Noga Meirc, Jaehong Jangd, Ik Hwan Kimd, Hyunkyu Kimd

From Lab to Fab: In-line SIMS for Process Control in Semiconductor Manufacturing

April 2024

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Authored by: Stefan Schoeche*a, Katherine Siega, Daniel Schmidta, Mohsen Nasseria, Shogo Mochizukia, Marinus Hopstakenb, Yaguang Zhuc, Li Xiangc, Julia Hoffmanc, Daniel Lewellync, Paul Isbesterc, and Sarah Okadac

Unique Spectral Interferometry solutions for complex High AspectRatio 3D NAND structures

April 2024

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Authored by: Jaesuk Yoona, Jongmin Parka, Minjung Shina, and Dongchul Ihma, Oshrat Bismuthb, Smadar Ferberb, Jacob Ofekb, Igor Turovetsb, Isaac Kim, aFlash Process Development Team MI, Samsung R&D Center, Hwaseong, Korea, NOVA Ltd, Rehovot, Israel, Nova Measuring Instruments Korea Ltd., Gyeonggi-do, Korea.

A Flexible Deep Learning Based Approach for SEM Image Denoising

April 2024

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Authored by: Jun Chen, Xinheng Jiang, Keisuke Goto, Takashi Tsutsumi, Yasutaka Toyoda Hitachi High-tech Corp.,

Spectral Interferometry for TSV Metrology in Chiplet Technology

April 2024

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Authored by: Stefan Schoeche, Daniel Schmidt, Junwon Han, Shahid Butt, Katherine Sieg, Marjorie Cheng, Aron Cepler, Shaked Dror, Jacob Ofek, Ilya Osherov, and Igor Turovetsc IBM Research, 257 Fuller Road, Albany, NY 12203, USA Nova Measuring Instruments Inc., 3342 Gateway Blvd, Fremont, CA 94538, USA Nova Ltd., 5 David Fikes St., Rehovot, 7632805, Israel

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