Nova i570™

Nova i570™ HP Integrated Metrology System

Highest performance IM solution in the market

The Nova i570™ HP is Nova’s most advanced integrated metrology platform that provides highest metrology performance, process control and productivity capabilities. Targeting manufacturing of most advanced logic and memory technology nodes.

Highlights and Benefits

  • Highest throughput in the market supporting the newest and fastest CMP polishers
  • Superior within-wafer and within-die variation control
  • Market leading accuracy, precision, and tool-to- tool matching specification
  • Full metrology compatibility with Nova i550® platform
  • Integration with leading process tools

The Nova i570™ HP platform is the embodiment of Nova’s mission, as the Integrated Metrology market leader, to provide the highest performance platform for R&D and high-volume manufacturing fabs.
As the next step of the successful Nova i550® platform, the Nova i570™ HP offers a breadth of spectral information, the smallest pad size and cutting-edge pattern recognition.

i570™ HP offers the highest throughput in the market, supporting the newest and fastest CMP polishers and allowing better within-wafer and within-die variation control by measuring more sites, as well as pre and post-wafer measurements. Enriched with Nova’s advanced modeling and algorithmic solutions, the i570™ HP provides major enhancements in metrology accuracy, precision and tool matching capabilities. 

The Nova i570™ HP platform is supported by Nova’s central fleet management, control and connectivity suite for boosted operational efficiency and advanced metrology control functionality.