Nova Elipson®

Standalone optical materials metrology system that brings advanced Raman Spectroscopy capabilities to the fab

Nova Elipson®

Nova Elipson® is a high-end, standalone metrology system that measures material properties for the Memory and Logic market segments. The system leverages Raman Spectroscopy to carry out optical material metrology (OMM) to analyze material properties such as composition, strain, crystallinity, and surface properties. A smart, data-rich solution, Nova Elipson® enables the rapid flow of new information on the production floor to bring research-grade capabilities to the high-volume manufacturing (HVM) fab.

Highlights and Benefits

HVM-Proven Solution

Multiple Wavelength Source

Small Spot Size

Full Polarization Control

Advanced Algorithmic Suite

HVM-Proven Solution

Multiple Wavelength Source

Small Spot Size

Full Polarization Control

Advanced Algorithmic Suite

HVM-Proven Solution

300mm fully automated, recipe driven solution, seamlessly integrated to the fab’s YMS (yield management system) to continuously stream quantitative data for APC purposes

Multiple Wavelength Source

Enables adjustment of probing depth via selection of light source with adequate penetration, while optimizing the acquisition per materials of interest

Small Spot Size

Excellent spatial resolution accurately resolves features of interest and enables reliable in-die sampling

Full Polarization Control

Advanced Polarization control of the Raman spectrum is used to selectively extract the signal of interest and filter out unwanted surrounding data

Advanced Algorithmic Suite

User-friendly proprietary algorithmic suite to extract an insightful range of material characterization

Nova Elipson®

Why Nova Elipson®?

Materials are one of today’s key performance enhancement drivers for advanced nodes. As a result, new materials and alloys are constantly being introduced into the semiconductor industry. In parallel, manufacturing processes are becoming increasingly complex, which drives the evolution of customer process control needs. This complexity urges a need for extensive information flow to accurately characterize material properties and thus enables quality production and effective process control across all HVM stages. This requirement is reinforced through the integration of Nova Elipson® Raman Spectroscopy, a sophisticated in-line solution extracting real-time insights that had been previously available only in a laboratory environment.

What is Nova Elipson®

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Press Releases

Nova Expands Adoption of Elipson for Advanced Memory Devices

Nova Expands Adoption of Elipson for Advanced Memory Devices

30 Sep, 2021
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IBM Research and Nova Jointly Awarded the “Best Metrology Paper” at SPIE Advanced Lithography Conference

IBM Research and Nova Jointly Awarded the “Best Metrology Paper” at SPIE Advanced Lithography Conference

26 Apr, 2022
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Nova Introduces Unique Portfolio to Address Next-Generation Logic Fabrication Challenges

Nova Introduces Unique Portfolio to Address Next-Generation Logic Fabrication Challenges

17 Feb, 2022
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Nova Metrion® Selected by Advanced Logic Manufacturer

Nova Metrion® Selected by Advanced Logic Manufacturer

12 Jul, 2022
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