Nova Elipson® is a high-end, standalone metrology system that measures material properties for the Memory and Logic market segments. The system leverages Raman Spectroscopy to carry out optical material metrology (OMM) to analyze material properties such as composition, strain, crystallinity, and surface properties. A smart, data-rich solution, Nova Elipson® enables the rapid flow of new information on the production floor to bring research-grade capabilities to the high-volume manufacturing (HVM) fab.
Why Nova Elipson®?
Materials are one of today’s key performance enhancement drivers for advanced nodes. As a result, new materials and alloys are constantly being introduced into the semiconductor industry. In parallel, manufacturing processes are becoming increasingly complex, which drives the evolution of customer process control needs. This complexity urges a need for extensive information flow to accurately characterize material properties and thus enables quality production and effective process control across all HVM stages. This requirement is reinforced through the integration of Nova Elipson® Raman Spectroscopy, a sophisticated in-line solution extracting real-time insights that had been previously available only in a laboratory environment.
What is Nova Elipson®
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Nova Expands Adoption of Elipson for Advanced Memory Devices
IBM Research and Nova Jointly Awarded the “Best Metrology Paper” at SPIE Advanced Lithography Conference
Nova Introduces Unique Portfolio to Address Next-Generation Logic Fabrication Challenges