In-air / In-water Integrated Metrology system for 200mm wafers
NovaScan 2040 is Nova’s integrated metrology offering for semiconductor 200mm fabs.
The NovaScan 2040 applies 200nm wafer spectrophotometry technology to measure the thickness of dielectric and conducting transparent films in a non-contact process environment, thus enabling the tightest possible wafer-to-wafer control. Closed Loop Control (CLC), utilizing the measurement data, provides real-time adjustment of the CMP process.
Highlights and Benefit
- Advanced integrated metrology platform
- Wide range of applications
- High throughput and low cost of ownership
- Enables advanced process management with Closed Loop Control
- In-air or In-water, in line measurement