Measure the Invisible to Provide Deep Process Insight
Nova offers a comprehensive suite of materials and dimensional metrology combined with advanced modeling that enables semiconductor manufacturers to gain deeper insight throughout the entire manufacturing process, increase yields, and shorten time to market.
Our Product Portfolio
Dimensional MetrologyIntegrated and standalone optical platforms for critical dimension (CD) and thin films measurementsExplore Product Families >
Materials MetrologyInline XPS and XRF platforms for composition and film thickness measurementsExplore Product Families >
Software SolutionsAdvanced modeling solutions empowered by physical and machine learning algorithmsExplore Product Families >