metrology products

Measure the Invisible to Provide Deep Process Insight

Nova offers a comprehensive suite of materials and dimensional metrology combined with advanced modeling that enables semiconductor manufacturers to gain deeper insight throughout the entire manufacturing process, increase yields, and shorten time to market.

Our Product Portfolio

  • Dimensional Metrology Icon

    Dimensional Metrology

    Integrated and standalone optical platforms for critical dimension (CD) and thin films measurements
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  • Materials Metrology Icon

    Materials Metrology

    Inline XPS and XRF platforms for composition and film thickness measurements
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  • Chemical Metrology Icon

    Chemical Metrology

    Reduce cost of ownership and increase yield by controlling organic and inorganic chemistry composition of electrochemical plating baths across front-end, packaging and PCB wafer-level processes.
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  • Software Solutions Icon

    Software Solutions

    Advanced modeling solutions empowered by physical and machine learning algorithms
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