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Products overview

Measure the Invisible to Provide Deep Process Insight

Nova offers a comprehensive suite of dimensional, materials, and chemical metrology solutions combined with advanced modeling and machine learning. These enable semiconductor manufacturers to gain deeper insight throughout the production process, increase yield, and shorten time to market.

Translate Metrology Data
into Concise Insight

Nova’s integrated and standalone optical metrology platforms for optical critical dimensions (CD) and thin film measurements, increase productivity, reliability and accuracy for the manufacturing of the most advanced semiconductor technology nodes.

Nova MMSR+

Nova Prism

Nova Astera® Prime

Nova Astera® Prime

Nova i570® HP

Nova i550®

Nova i500®

Nova T550®

Nova T500®

Read More About Dimensional Metrology See Related Technologies

In-Line Materials Metrology for Semiconductor Manufacturing

Nova’s highly sensitive materials metrology, designed and proven for high-volume manufacturing in-line process control enable critical metrology solutions to enhance device functionality and manufacturing yield, while shortening time to results.

Nova Metrion®

Nova Elipson®

Nova VeraFlex® III

Nova VeraFlex® III

Nova VeraFlex® III+

Nova VeraFlex® III+

Nova VeraFlex® IV

Nova VeraFlex® IV

Nova QED

Nova RACS

Read More About Materials Metrology See Related Technologies

Rich, Industry-Standard
Chemical Analysis

Nova’s advanced, open and flexible chemical metrology solutions carry out chemical analysis and replenishment in real time to ensure high-quality electroplating processes for front-end metallization, backend packaging, IC substrate and high-end PCB processes.

Nova AncoFlex®

Nova Ancolyzer®

Nova Ancolyzer®

Nova AncoScene®

Nova AncoScene®

Nova DMR®

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Pursuing Insights to
Simplify Complex Problems

Nova’s comprehensive software modeling solutions combine top-notch algorithms in the field of artificial intelligence, physical, geometrical and data- driven machine-learning modeling solutions, supported by a computational management layer, and centralized fleet Management and control. This comprehensive suite addresses the full gamut of modeling and application development needs for the most advanced technology nodes.

Nova Fleet Management®

Nova Fleet Management®

Nova Fit®

Nova MARS®

Nova QED

Nova RACS

Read More About Software Solutions See Related Technologies

Global support services dedicated to your sucess

Nova’s Global Services is structured to support you through a product’s lifecycle, guide you towards your goal of achieving and maintaining high-quality yields, and meeting special metrology requirements

Read More About our Services

Products overview

Read More About our Services

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