Join us at SPIE 2026 where the following presentations will be held:
- The Art of Holistic Metrology (in memory of Alok Vaid) by Igor Turovets, Nova Ltd
CONFERENCE 13981, Metrology, Inspection, and Process Control XL
SESSION 1: Hybrid And Virtual Metrology
23 February, 1:30 PM PST | Convention Center, Grand Ballroom 220B
2.
In-line XPS for advanced semiconductor manufacturing and metrology on fully integrated targets by Christopher J. Lee, IBM Research – Albany (US)
CONFERENCE 13981 Metrology, Inspection, and Process Control XL
SESSION 2 Metrology And Inspection For Advanced Logic Devices
23 February, 4:20 PM PST | Convention Center, Grand Ballroom 220B
3. Model-based Raman simulations for optimized metrology in nanosheet transistor devices by Stefan Schoeche, IBM Research – Albany (US)
CONFERENCE 13981 Metrology, Inspection, and Process Control XL
SESSION 3 Modeling And Data Analysis
24 February, 9:50 AM PST | Convention Center, Grand Ballroom 220B
4.
In-line monitoring of hybrid bonding Cu recess by combining interpolated reference metrology and OCD machine learning by Padraig R. Timoney, IBM Research – Albany (US)
CONFERENCE 13981 Metrology, Inspection, and Process Control XL
SESSION 4 Heterogeneous Integration And Advanced Packaging
24 February, 10:50 AM PST | Convention Center, Grand Ballroom 220B
5. In-line XPS metrology for area selective deposition processes on patterned structures by Manasa Medikonda, IBM Research – Albany (US)
CONFERENCE 13981 Metrology, Inspection, and Process Control XL
SESSION 7 X-Ray Metrology And Inspection
25 February, 9:30 AM PST | Convention Center, Grand Ballroom 220B
6. Evaluation of In-line SIMS impact on device reliability and performance
Poster Session
25 February 2026, 5:30 PM PST
Jander Cruz, IBM Research – Albany (US)
7. Integrated High-Resolution Edge Metrology for Enhanced CMP Process Control
Poster Session
25 February 2026, 5:30 PM PST
Cornel Bozdog, Micron Technology, Inc. (US)
8. SC1100 Scatterometry in Profile, Overlay and Focus Process Control
Course SC1100
22 February 2026, 1:30 PM PST
Hugo Cramer, ASML Netherlands B.V. (Netherlands) & Igor Turovets, Nova Ltd. (Israel)