Nova Hub is a comprehensive, high‑performance solution that streamlines the operation and management of large metrology tool fleets, helping maximize productivity, operational efficiency, and overall performance in high‑volume manufacturing environments.
Built on a GPU‑accelerated server and Kubernetes, Nova Hub provides the foundation for AI‑driven applications supporting ongoing improvements in performance and overall cost‑of‑ownership.
Why Nova Hub?
FleetBoost
The ultimate toolbox to quickly and efficiently get your fleet up and running optimally while providing full visibility to its measurement data in real time. It includes:
Recipe Builder
A wizard-based application to rapidly build recipes from existing ingredients. Off-tool and without wafers.
Recipe Management System (RMS)
Enables effortless distribution when updates occur and simplifies tracking and rolling back changes.
SMatch (Tool Matching)
Enable the selective adjustment of a recipe of specific tools to achieve a fully matched, uniformly operating fleet.
Cross-Tool Injection
Enables the route of measurement results and spectra between tools to avoid “Lot on Hold” scenarios.
Advanced Data Analytics
A central view of the fleet’s measurement data and associated reports that help identify trends and outliers for predictive insights.
FleetView
A comprehensive suite of tools and fleet-level operational reports, enabling quality performance tracking, easy troubleshooting, and smart decision-making for corrective actions.
Tool & Recipe Health Reports
Health dashboard enabling proactive maintenance and recipe optimization to maximize wafer outs and avoid unscheduled downtime.
Tool Performance Reports
Provide insights on wafer handling trends, as well as alignment and measurement retries.
Fleet Performance Reports
Provide insights into the fleet loading and capacity, as well as recipe measurement time deviation across all recipes in the fleet.
Nova Hub Server
The Nova Hub Server provides the high‑performance foundation for fleet‑level metrology intelligence. Built on GPU‑accelerated compute and Kubernetes automation, it reliably supports AI‑driven analytics and scalable application deployment. Its architecture is designed for high‑availability operation, with redundant server configuration and shared central storage, ensuring continuous data access and resilient performance.
With robust connectivity, long‑term data retention, cloud‑ready integration, and infrastructure designed for predictive hardware monitoring, the Nova Hub Server gives fabs a dependable, future‑proof platform that keeps metrology operations aligned, efficient, and at peak performance.
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