The Nova i580 is the most advanced high-performance integrated metrology platform for CMP process control. It is designed to support the manufacturing of advanced logic and memory technology nodes, as well as advanced packaging devices, featuring a unique optional capability for Wafer Edge Metrology. This innovative platform further solidifies Nova’s leadership in Integrated Metrology for CMP process control.
Why Nova i580?
In addition to its high-end Optical CD capabilities, Nova i580 introduces a groundbreaking Wafer Edge Metrology capability, which is essential for wafer bonding in advanced packaging and other advanced integration processes.
Powered by Nova’s state-of-the-art modeling and machine learning technologies, it delivers angstrom-level precision, best-in-class tool-to-tool matching, and outstanding reliability.
When supported by Nova’s central fleet management, control, and connectivity suite, Nova i580® offers even greater operational efficiency and advanced metrology control functionality.
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