The Nova SemDex series is a family of optical wafer metrology platforms designed to support Advanced Packaging processes. The multi-sensor metrology system of all SemDex series tools is highly versatile, with measuring instruments based on optical interferometry, reflectometry, and microscopy techniques to measure critical geometric dimensions of wafers. From fully automated to semi-automated and manual handling, SemDex’s diverse range of metrology solutions is designed to satisfy the needs of different manufacturing scales, productivity, and cost requirements while supporting a wide range of applications
Why Nova SemDex?
Nova SemDex Series is a cutting-edge family of multi-sensor wafer metrology platforms tailored for Advanced Packaging. Combining high-end optical technologies—interferometry, reflectometry, and microscopy, Nova SemDex delivers precise, reliable measurements across diverse manufacturing needs.
With models like Nova SemDex A, M2, and M1, the series offers a versatile offering of scalable solutions. Flexibly designed, Nova SemDex supports various wafer sizes, framed, and warped wafers with customizable load ports and end effectors. Its SEMI-compliant automation and centralized recipe management ensure seamless fab integration and high throughput.
Nova SemDex A
Nova SemDex A is a fully automated wafer metrology tool developed for the semiconductor industry to provide process reliability and quality assurance. Both wafer handling and the metrology part perform automatically.
Nova SemDex A automates all metrology wafer handling for any size (wafer diameter from 100 mm to 330 mm) and type (blanked and patterned, bonded, taped, and framed wafer) and connects the whole metrology via SECS/GEM to the fab host.
Nova SemDex A is optimized for high-volume manufacturing fabs and offers full support for OHT (Overhead Hoist Transport) integration.
Nova SemDex M2
Nova SemDex M2 offers similar capabilities to Nova SemDex A, but with a single load port. Wafer handling can be either manual or fully automated. It thus provides a cost-effective solution for customers with lower production volumes.
Nova SemDex M2 automates all metrology wafer handling for any size (wafer diameter from 100 mm to 330 mm) and type (blanked and patterned, bonded, taped, and framed wafer).
Nova SemDex M1
Nova SemDex M1 is a semi-automated wafer metrology tool. While wafer handling is manual, the metrology process is performed automatically. Combined with its small footprint, Nova SemDex M1 is ideal for R&D and very low production volumes.
