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NovaMARS®

Advanced 3D Modeling Software for Optical Critical Dimension Calculation

The NovaMARS software package is a multi-channel metrology modeling engine designed for the most advanced 3D structures in advanced process nodes of semiconductor manufacturing. It’s a complete modeling solution for scatterometry model development, material characterization and recipe optimization which is crucial for facing increasing challenges in semiconductor metrology.

Highlights and Benefit

  • Fast and precise solution development and Library generation
  • Maximizes input to create optimized solution leveraging Nova’s holistic approach
  • Supports highly complex 2D/3D structures
  • Easy-to-use model building featuring NovaMARS StackMaker™
  • Built-in, intuitive and user-friendly NovaMARS MatMaker™ for material characterization
  • Designed for mutli-channel recipe optimization

The NovaMARS utilizes advanced and unique algorithms optimizing speed and accuracy of Optical CD calculations, library generation and automatic channel selection for optimized solutions. Combined with NovaFit™ advanced modeling suite and NovaHPC® High Performance Computing, NovaMARS is a complete Optical CD metrology solution suitable for all Nova’s measurement platforms, and addresses the most advanced metrology challenges in FinFET, Nano-wires, 3D NAND and DRAM fabrication.

The NovaMARS StackMaker™ designer for scatterometry models allows simple drag-and-drop design and visualization of very complex 3D device geometries. This simple yet powerful approach makes it easy for users to create new models, implement design and process changes into existing models and track the design evolution.

The NovaMARS MatMaker™ materials characterization package provides a significantly-faster regression engine – delivering fast convergence to the correct materials and solution. Multiple enhancements to spectral matching routines complete the package.