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Dimensional Metrology

Measure the Invisible to Deliver Deep Process Insight

Nova’s advanced multi-disciplinary dimensional metrology technologies combine complex opto-mechanical hard-ware with advanced optics and leading-edge algorithms, which deliver continuous innovation for effective process control throughout the semiconductor fabrication lifecycle. Nova’s technical innovation and market leadership enable customers to improve process performance, enhance products’ yields and accelerate time to market

Dimensional Metrology Products

Nova ASTERA™

ASTERA-PRIME

Nova i570® HP

i570HP

Nova T600® MMSR

MMSR

Nova PRISM

PRISM

Dimensional Metrology
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Materials Metrology

Inline Platforms for Composition and Film Thickness Measurements

Nova is a market leader for innovative thin film metrology and process control innovations. Our technologies enable customers to accurately detect and quantify small variations in film composition and thickness, thereby influencing better device functionality, and improved manufacturing yield.

Materials Metrology Products

Nova METRION®

METRION

Nova ELIPSON™

ELIPSON

Nova VERAFLEX®

VERAFLEX

Materials Metrology
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Chemical Metrology

Flexible Industry-Standard Platforms for Chemical Process Control

Nova offers a market-leading portfolio of advanced, open and flexible chemical metrology platforms for backend wafer-level packaging and front-end damascene process steps. Our portfolio helps manufacturers ensure high-quality electroplating processes by carrying out chemical analysis and replenishment in real time.

Chemical Metrology Products

Nova DMR

DMR

Nova ancolyzer®

zncolyser

Nova ancolyzer® Damascene

Danascene

Chemical Metrology
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Software Solutions

Pioneering Holistic Approach to Modeling Driven Insights

Nova’s cutting-edge metrology software modeling technology provides the most comprehensive algorithmic solutions for application development including model-based, machine learning and advanced Hybrid Metrology algorithms that enable high-performance metrology and deliver breakthrough performance in Time-To-Solution (TTS) and accuracy for the most complex 3D structures

Software Solutions

Nova MARS

MARS

Nova FIT

FIT

Nova FM+

FM+

Software Solutions
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