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Nova Metrion® Use Cases
In our companion blog post covering Metrion we explored the importance of SIMS technology for semiconductor process insight, reviewed the unique value of an automated inline tool such as Metrion, and covered the unique value Metrion offers for customers. Now let's review some widely applicable use cases. Several use cases that we will explore for […]
Nova Metrion®: Analyzing Materials Composition of Complex S...
Nova Metrion® directly measures the composition of wafer materials using Secondary Ion Mass Spectrometry (SIMS). Metrion performs SIMS measurements in-line on full 300mm product wafers with complex film stacks for both logic and memory devices. Performing these measurements in the semiconductor fab, rather than in a cost-and-time intensive laboratory setting, provides faster results, which reduces […]