Technologies Overview Chemical Metrology
High-Performance Liquid Chromatography (HPLC)

High-Performance Liquid Chromatography (HPLC)

Nova’s chemical metrology product line leverages High-Performance Liquid Chromatography (HPLC), a mature quantitative analysis method.

High-Performance Liquid Chromatography (HPLC)

Highlights and Benefits

Fully Automated

Multi- Component Determination

Highest Precision

Multi-Component Detection

High Flexibility

Fully Automated

Multi- Component Determination

Highest Precision

Multi-Component Detection

High Flexibility

Fully Automated

Features a compact, fully automated workstation

Multi- Component Determination

Simultaneously determines multiple components in one run

Highest Precision

Offers the most precise organic component measurement method even at very low concentrations

Multi-Component Detection

Detects both known and unknown, including unexpected and undesired components, such as contaminants and breakdowns, which accumulate during the lifetime of the plating bath

High Flexibility

Maintains high flexibility due to numerous separation and detection principles

High-Performance Liquid Chromatography (HPLC)

HPLC is a technique whereby all relevant components are separated before being measured. At the beginning of the analysis, a small sample (10-100 µL) is delivered  into an HPLC column via the mobile or eluent phase. The sampled solution’s components interact with the stationary phase, passing through the column at different speeds depending on their level of interaction. The least interacting components move faster through the column (elute), while the stronger interacting components move slowly. A detector at the end of the column identifies the separated components. The detector’s signal is recorded and used to calculate the concentration of the analyzed components.

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Press Releases

ancosys Chemical Metrology Solution Selected by Additional Front-End Customer

ancosys Chemical Metrology Solution Selected by Additional Front-End Customer

01 Jan, 1970
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Nova Expands Into Advanced Chemical Metrology With ancosys Acquisition

Nova Expands Into Advanced Chemical Metrology With ancosys Acquisition

01 Jan, 1970
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Nova Completes Acquisition of ancosys

Nova Completes Acquisition of ancosys

01 Jan, 1970
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IBM Research and Nova Jointly Awarded the “Best Metrology Paper” at SPIE Advanced Lithography Conference

IBM Research and Nova Jointly Awarded the “Best Metrology Paper” at SPIE Advanced Lithography Conference

01 Jan, 1970
Read More

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Authored by: Sasmita Srichandan, Franz Heider, Georg Ehrentraut, Stephan Lilje, Christian Putzi, Sanja Radosavljevic, Egidijus Sakalauskas
Authored by: Hyunwoo Ryoo*a, Seul Ji Songb, Min Ji Jeona, Juhyun Moonb, JiHye Leea, ByungHyun Hwanga, Jeongho Ahna, Yoon-jong Songb, Hidong Kwaka, Lior Neemanc, Noga Meirc, Jaehong Jangd, Ik Hwan Kimd, Hyunkyu Kimd
Authored by: Stefan Schoeche*a, Katherine Siega, Daniel Schmidta, Mohsen Nasseria, Shogo Mochizukia, Marinus Hopstakenb, Yaguang Zhuc, Li Xiangc, Julia Hoffmanc, Daniel Lewellync, Paul Isbesterc, and Sarah Okadac
Authored by: Jaesuk Yoona, Jongmin Parka, Minjung Shina, and Dongchul Ihma, Oshrat Bismuthb, Smadar Ferberb, Jacob Ofekb, Igor Turovetsb, Isaac Kim, aFlash Process Development Team MI, Samsung R&D Center, Hwaseong, Korea, NOVA Ltd, Rehovot, Israel, Nova Measuring Instruments Korea Ltd., Gyeonggi-do, Korea.
Authored by: Jun Chen, Xinheng Jiang, Keisuke Goto, Takashi Tsutsumi, Yasutaka Toyoda Hitachi High-tech Corp.,
Authored by: Stefan Schoeche, Daniel Schmidt, Junwon Han, Shahid Butt, Katherine Sieg, Marjorie Cheng, Aron Cepler, Shaked Dror, Jacob Ofek, Ilya Osherov, and Igor Turovetsc IBM Research, 257 Fuller Road, Albany, NY 12203, USA Nova Measuring Instruments Inc., 3342 Gateway Blvd, Fremont, CA 94538, USA Nova Ltd., 5 David Fikes St., Rehovot, 7632805, Israel